Samsung Electro-Mechanics Busan — TESCAN CLARA FE-SEM DVIA-MB1000 (161213R2) installation report — 2026-01-07
Contents
Overview
삼성전기 부산사업장 A6동 3층 수입검사실로 이전 설치된 DVIA-MB1000 튜닝 및 진동측정 진행하였습니다.
장비 Turned off 상태로 튜닝 및 진동측정 진행하였습니다.
Data를 VC Curve로 표기 후 진동 수준에 대한 Reference 자료를 제공합니다.
Vibration Isolation System Info
Model: DVIA-MB1000
Serial Number: 161213R2
Engineer
대일시스템 필드엔지니어 이채원
Tuning Date
2026년 01월 06일
Report written date
26.01.07
Installation Site
삼성전기 부산사업장 A6동 3층 수입검사실
End User
삼성전기
Equipment
Manufacturer: TESCAN
Equipment: FE-SEM
Model: CLARA
Equipment specification
<10 um/s below 30 Hz, <20 um/s above 30 Hz
Equipment Condition
장비 설치 및 Turned off
Measurement Device
10.1) Data Physics DAQ
-Hardware: QUATTRO, Serial Number: 22436
-Software: SignalCalc ACE
10.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measurement Setup
F Span: 200 Hz
Lines: 3200
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Averaging mode: Exponential, 40
Conclusion
모든 방향에서 진동스펙을 만족합니다.
Measurement Summary
| Measurement site | State | Direction | Measurement data | Measurement result | ||
|---|---|---|---|---|---|---|
| Floor | DVIA-MB1000 | Floor | DVIA-MB1000 | |||
| 삼성전기 부산사업장 A6동 3층 수입검사실 1. Floor 2. DVIA-MB1000 | Turned off | Vertical | VC-A @ 8 Hz | VC-E @ 8 Hz | ✗ FAIL | ✓ PASS |
| Left to Right | VC-C @ 4 Hz | VC-G @ 4 Hz | ✓ PASS | ✓ PASS | ||
| Front to Back | VC-D @ 3.15 Hz | VC-G @ 3.15 Hz | ✓ PASS | ✓ PASS | ||
Data and Image
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospectrum
Front to Back Transmissibility
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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