Zeiss SUPRA 55 DVIA-M1000 P2 Vibration Environment Results — Bruker Relocation Installation (2015)
Contents
Vibration Environment Measurement Results (Bruker Relocation Installation)
1. Overview
To evaluate whether the vibration environment satisfies the customer's requirements after application of the M-1000 P2 vibration isolation platform.
2. Measurement date-time and personnel
Measurement date/time: January 22, 2015 (Wed) 17:30 · Measurement engineer: Sungwon Choi
3. Measurement site
Trade Infocom Center, 4th floor
4. Measurement conditions and results
Carl Zeiss SUPRA 55 installed; onboard passive vibration isolation equipment and instrumental functions operational.
Measured while the rear pump was not operating. Vibration levels may increase when the pump is running.
Measurement site photograph
Results summary
| Test Direction | VC-Class | Base | Top |
|---|---|---|---|
| ACTIVE | Z | D | G |
| X | E | G | |
| Y | E | G |
Vibration isolation platform intrinsic performance acceptable.
Site floor vibration remains favorable (horizontal axes E-Class, vertical D-Class). However horizontal 1–5 Hz bands are comparatively elevated versus other installs; without the vibration isolation stage the X-axis can fall out-of-spec near 2 Hz.
Active ON — tabletop vibration environment G-Class or better — good.
Active ON — Satisfies SUPRA 55 VP vibration spec: <7.2㎛/sec RMS for f > 25 Hz / <14㎛/sec RMS for f < 25 Hz.
VAAV program measurement results
FFF Z
FFF X
FFF Y
OCTAVE BAND
Active Z
Active X
Active Y
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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