Hanyang University M-1000 P8 vibration environment survey — 2014-12-29

To determine whether the vibration environment satisfies the user’s requirements after installing the M-1000 P8 vibration isolation platform.

Date and time: 2014. 12. 29 (Mon) 15:30, Operator: 최성원

Hanyang University College of Engineering, FTC Building, 2nd floor

With FEI SEM installed; the onboard equipment remained in the built-in passive configuration with instrument functions not activated.

An anechoic room and EMI shielding additions are planned, so the environment may change.

Measurements were taken without excitation at the front-center of the upper plate and at the front floor (base) of the isolation platform.

Isolator intrinsic performance is good.

Floor vibration is F Class on horizontal axes, but the vertical axis is high at B Class; per the FEI engineer, the floor may be relatively compliant and pumps or chillers in the room may contribute.

In ACTIVE mode, the upper-plate environment is good at G Class or better.

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