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Installation Report
DVIA-M Series
04-21-2022

Hanyang University DVIA-MB1000 (141211R5) Installation Report — 2022-04-21

DVIA-M Series
Installation Report
Hanyang University
DVIA-M1000
DVIA-MB1000
141211R5
SEM

Contents

Prepared for

Hanyang University

Prepared by

Engineer: Youngha Lee

Tuning date: 22.04.21

Report written date: 22.04.21

Date of business trip : 17.12.27~17.12.29

Overview

The DVIA-MB1000 active vibration isolation platform is appropriately installed and functioning as intended.

System Information

Model: DVIA-MB1000

Serial Number: 141211R5

Engineer

Youngha Lee, Seounghoon Cheon from DAEIL SYSTEMS

Tuning Date

April 21, 2022

Location

Hanyang University ,Sungdong Seoul

Equipment

SEM Equipment

Summary of Vibration Results

Measurement PointZ-axis (Vertical) 1-10 HzZ-axis (Vertical) 10-80 HzX-axis (Left to Right) 1-10 HzX-axis (Left to Right) 10-80 HzY-axis (Front to Back) 1-10 HzY-axis (Front to Back) 10-80 Hz
FloorCBEFFE
ActiveGEGGGG

Data and Image

Z-axis (Vertical) VC curves

Floor

Active

Z-axis (Vertical) Transmissibility

X-axis (Left to Right) VC curves

Floor

Active

X-axis (Left to Right) Transmissibility

Y-axis (Front to Back) VC curves

Floor

Active

Y-axis (Front to Back) Transmissibility

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date04-21-2022
Tags
DVIA-M Series
Installation Report
Hanyang University
DVIA-M1000
DVIA-MB1000
141211R5
SEM

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