Skip to main content
Installation Report
DVIA-M Series
11-15-2024

Korea Electronics and Machinery Convergence Technology Institute DVIA-MB3000 (141104R5) Installation Report — 2024.11.15

DVIA-M Series
Installation Report
Korea Electronics and Machinery Convergence Technology Institute
DVIA-MB3000
141104R5

Contents

Overview

한구화학연구원에서 한국전자기계융합기술원으로 이전 설치된 DVIA-MB3000 제품 점검 및 튜닝 진행하였습니다.

튜닝 전 장비에 이상이 없는지 점검하였습니다.

Data를 VC Curve로 표기 후 진동 수준에 대한 Reference 자료를 제공합니다.

Vibration isolation platform

Model: DVIA-MB3000

Serial Number: 141104R5

Engineer

대일시스템 필드엔지니어 이채원, 국내영업 김동환

Measurement date

2024년 10월 31일

Report written date

24.11.15

Installation site

한국전자기계융합기술원 104호

Equipment status

장비 미설치

Customer equipment

Manufacturer: Self made

Equipment: -

Model: -

Vibration measurement instruments

8.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

8.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measurement setup

Bandwidth: 200 Hz

Lines: 3200

Averaging: FFT Spectrum Averaging

Engineering Units: m/s

Window: Hanning

Equipment vibration specification

미정

Conclusion

모든 방향에서 VC-G의 진동이 측정됩니다.

Measurement data

Measurement siteStateDirectionFloorDVIA-MB3000
한국전자기계웅합기술원 104호
1. Floor
2. DVIA-MB3000		장비 미설치VerticalVC-E
@ 25 Hz		VC-G
@ 25 Hz
Left to RightVC-F
@ 40 Hz		VC-G
@ 40 Hz
Front to BackVC-G
@ 10 Hz		VC-G
@ 10 Hz

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospecturm

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

Share this Case Study

Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date11-15-2024
Tags
DVIA-M Series
Installation Report
Korea Electronics and Machinery Convergence Technology Institute
DVIA-MB3000
141104R5

Related Case Studies

LG InnoTek ZEISS Xradia 620 Versa DVIA-MB3000 (201201R2) Installation Report — 2026.02.09
DVIA-M Series

LG InnoTek ZEISS Xradia 620 Versa DVIA-MB3000 (201201R2) Installation Report — 2026.02.09

02-09-2026Read more
Changping P3 Laboratory Thermo Fisher Scientific Cryo-TEM Krios G4 DVIA-MB3000 (250708R5-1) Installation Report — November 5, 2025
DVIA-M Series

Changping P3 Laboratory Thermo Fisher Scientific Cryo-TEM Krios G4 DVIA-MB3000 (250708R5-1) Installation Report — November 5, 2025

11-05-2025Read more
Tier-1 Semiconductor ZEISS Versa 620 X-ray Microscope DVIA-MB3000 (170515R4) Installation Report — 2025.07.08
DVIA-M Series

Tier-1 Semiconductor ZEISS Versa 620 X-ray Microscope DVIA-MB3000 (170515R4) Installation Report — 2025.07.08

07-08-2025Read more