Installation Report

DVIA-M Series

06-07-2024

Thermo Fisher Scientific Talos TEM DVIA-MB3000 Installation Report

DVIA-M Series

Installation Report

Thermo Fisher Scientific

Overview

The DVIA-MB3000 active vibration isolation platform is appropriately installed and functioning as intended

Vibration Isolation System Information

Model: DVIA-MB3000

Serial Number: 240201R4

Engineer

Byeonghun Cho from DAEIL SYSTEMS

Tuning Date

June 7, 2024

Number of Tuning Trial

1st tuning

Location

Hainan, China

Equipment

Manufacturer: Thermo Fisher Scientific

Equipment: TEM

Model: Talos

Equipment Condition

The equipment is installed / IDLE

Tuning Request

Equipment allowable vibration

Vertical: VC-E / Left to Right: VC-F / Front to Back: VC-F

Data and Image

Vertical Transmissibility

Left to Right Transmissibility

Front to Back Transmissibility

Equipment picture

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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