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Installation Report
DVIA-M Series
06-11-2024

Thermo Fisher Scientific Glacios 2 Cryo-TEM DVIA-MB3000 Installation Report

DVIA-M Series
Installation Report
Thermo Fisher Scientific

Executive Summary

Introduction

The purpose of this work is to install the Vibration Isolation MB 3000 system for the Thermo Fisher Scientific Glacios 2 at Pfizer. Thermo Fisher Scientific hired VEC to install the Daeil MB-3000 vibration isolation platform and provide a report of the completed work.

Summary Results

Below is a summary of the results:
MB3000 ON PASSED the Vibration specifications

Introduction

The purpose of this work is to install the Vibration Isolation MB 3000 system for the Thermo Fisher Scientific Glacios 2 at Pfizer. Thermo Fisher Scientific hired VEC to install the Daeil MB-3000 vibration isolation platform and provide a report of the completed work.

Product Details

Part DeliveredSerial NumberSoftware
MB3000230518R1Site-Specific Tune

Summary of Work

We installed the system by

- Positioning the modular platform under the microscope

We tested the system by

- Creating and uploading a site-specific tune
- Collecting vibration data to verify the performance

We left the system

- In position and turned on

Procedures

Vibration

VEC conducted vibration measurements in six directions. Acceleration measurements were taken at a bandwidth of 200 with units of um/s (RMS). The acceleration spectra with 200 bandwidths were recorded.

Setup

Vibration
Bandwidth200
Lines1600
WindowHanning
CouplingICP 2mA
Average TypeStable
Duration60
Engineering Unitsum/s (RMS)

Specifications

VEC used the following specifications for the project.

Specification Summary

ToolSpecification
Thermo Fisher Scientific Glacios 2Vibration
VC-F
X & Y
1.56 um/s 1Hz - 100Hz
VC-E
Z
3.12 um/s 1Hz - 100Hz

Detailed Specifications

Figure 1: Thermo Fisher Scientific Glacios 2 – 1 Vibration Specification

SystemVerticalLeft to rightFront to back
Glacios; TEM info Limit 0.23 nmEFF
Glacios; STEM res. 0.23 nmEFF

Results

Summary Results

Below is a summary of the results:
MB3000 PASSED the Vibration specifications

Detailed Results

TypePositionDirectionSpecificationMeasurementResult
VibrationFloorX-AxisVC-FVC-GPASS
Y-AxisVC-FVC-GPASS
Z-AxisVC-EVC-DPASS
IsolatorsX-AxisVC-FVC-GPASS
Y-AxisVC-FVC-GPASS
Z-AxisVC-EVC-GPASS

Data

Thermo Fisher Scientific Glacios 2

Vibration

Figure 2: Ground X-Axis

Figure 3: Isolators X Axis

Figure 4: Transmissibility X Axis

Figure 5: Ground Y-Axis

Figure 6: Isolators Y Axis

Figure 7: Transmissibility Y Axis

Figure 8: Ground Z-Axis

Figure 9: Isolators Z Axis

Figure 10: Transmissibility Z Axis

Figure 11: Final Results – SN

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date06-11-2024
Tags
DVIA-M Series
Installation Report
Thermo Fisher Scientific