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Installation Report
DVIA-M Series
06-11-2024

Thermo Fisher Scientific Scios 2 DualBeam – FIB SEM DVIA-MB1000 Installation Report

DVIA-M Series
Installation Report
Thermo Fisher Scientific

Contents

Introduction

This report provides the details of the installation of the MB1000 for the Thermo Fisher Scientific Scios 2 in Lab 123, 2450 Mariner Square Loop, Alameda, CA 94501. Sila Nanotechnologies hired VEC to install the vibration isolation system and provide a report of the completed work.

Summary

Below is a summary of the results:

MB1000 ON PASSED the Vibration specifications

Product Details

Part DeliveredSerial NumberSoftware
MB1000240213R2Site-Specific Tune

Summary of Work

We installed the system by

- Positioning the modular platform under the microscope
- Leveling the modular platform to within .5mm
- Attaching seismic restraints between the floor and the modular platform

We tested the system by

- Creating and uploading a site-specific tune
- Collecting vibration data to verify the performance

We left the system

- In position and turned on

Procedures

Vibration

VEC conducted vibration measurements in six directions. Acceleration measurements were taken at a bandwidth of 200 with units of g (RMS). The acceleration spectra with 200 bandwidths were recorded.

Setup

Vibration
Bandwidth200
Lines3200
WindowHanning
CouplingICP 2mA
Average TypeStable
Duration60
Engineering Unitsum/s (RMS)

Specifications

VEC used the following specifications for the project.

Specification Summary

ToolSpecification
Thermo Fisher Scientific Scios 2Vibration: All Directions SE-tool™ Spec Line

Detailed Specification

#TypeFrequencyCurrent AmplitudeAdvised AmplitudeReduction factor
1Floor Vertical2 Hz7.30.5813
2Floor Vertical3.15 Hz6.40.6210
3Floor Vertical2.5 Hz5.90.609.9
4Floor Vertical4 Hz7.71.26.3
5Floor Left-to-Right1.25 Hz1.10.234.7
6Floor Left-to-Right1 Hz0.840.184.6
7Acoustics315 Hz48 dB37 dB3.7
8Acoustics630 Hz45 dB34 dB3.5
9Acoustics200 Hz45 dB35 dB3.4
10Floor Vertical1.6 Hz1.90.563.3
11Acoustics125 Hz55 dB46 dB2.9
12Floor Vertical5 Hz6.82.52.8
13Acoustics500 Hz44 dB35 dB2.8
14Acoustics160 Hz53 dB45 dB2.4
15Floor Vertical6.3 Hz7.83.92.0
16Acoustics80 Hz55 dB49 dB1.9
17Acoustics1000 Hz42 dB38 dB1.7
18Floor Left-to-Right0.8 Hz0.530.311.7
19Acoustics100 Hz56 dB51 dB1.7
20Acoustics800 Hz42 dB38 dB1.6
21Floor Left-to-Right1.6 Hz1.10.681.6
22Acoustics400 Hz43 dB39 dB1.5
23Floor Left-to-Right0.63 Hz0.420.321.3
24Floor Vertical8 Hz9.17.01.3
25Floor Vertical1.25 Hz0.600.521.2
26Floor Left-to-Right2.5 Hz2.21.91.2
27Floor Left-to-Right2 Hz1.31.21.1
28Acoustics250 Hz39 dB38 dB1.1
29Floor Left-to-Right0.5 Hz0.330.321.0

Results

Summary Results

Below is a summary of the results:
MB1000 PASSED the Vibration specifications

Detailed Results

TypePositionDirectionSpecificationResult
VibrationFloorVerticalSE-tool™ Spec Line✗ FAIL
Front-BackSE-tool™ Spec Line✗ FAIL
Left-RightSE-tool™ Spec Line✗ FAIL
DVIA-MB1000VerticalSE-tool™ Spec Line✓ PASS
Front-BackSE-tool™ Spec Line✓ PASS
Left-RightSE-tool™ Spec Line✓ PASS

Data

Figure 1: Vibration (Vertical – Floor)

Figure 2: Vibration (Vertical – MB1000)

Figure 3: Vibration (Front-Back – Floor)

Figure 4: Vibration (Front-Back – MB1000)

Figure 5: Vibration (Left-Right – Floor)

Figure 6: Vibration (Left-Right – MB1000)

Figure 7: Final Result

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date06-11-2024
Tags
DVIA-M Series
Installation Report
Thermo Fisher Scientific

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