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Installation Report
DVIA-M Series
09-25-2023

Thermo Fisher Scientific Glacios 2 with Selectris Cryo-TEM DVIA-MB3000 Installation Report

DVIA-M Series
Installation Report
Thermo Fisher Scientific

Summary Results

Below is a summary of the results:

- DVIA-MB3000 PASSED the Vibration specifications.

This report details the installation of the Vibration Isolation MB3000 for the Thermo Fisher Scientific Glacios 2 with Selectris in Room 211B. Schrodinger hired VEC to install the active vibration isolation platform and provide a report of the completed work.

Product Details

Part DeliveredSerial NumberSoftware
MB3000230418R3Site-Specific Tune

Summary of Work

We installed the system by

- Positioning the DVIA-MB3000 under the microscope.
- Leveling the DVIA-MB3000 within 0.5mm.

We tested the system by

- Creating and uploading a site specific tune.
- Collecting vibration data to verify the performance.

We left the system

- In position and turned on.

Installer's Notes

The floor vibration was more significant than the last time we measured it (Feb 2023 By VEC [Jarrett]).

However, the system is performing well and meeting the advised amplitudes in the vibration advice table by a wide margin.

The Vertical vibration passes the specification.

The Front to Back vibration passes the specification.

The Left to Right vibration passes the specification.

Procedures

Vibration

VEC conducted vibration measurements in three directions. Acceleration measurements were taken at a bandwidth of 200 with units of um/s (RMS). The acceleration spectra with 200 bandwidths were recorded.

Setup

Vibration
Bandwidth200
Lines3200
WindowHanning
CouplingICP 2mA
Average TypeStable
Duration60
Engineering Unitsum/s (RMS)

Specifications

VEC used the following specifications for the project.

Specification Summary

Figure 1: TFS Floor Vibrations Advice Table

SurveyFrequencyDirectionPeak RMS (Ug)Advised RMS (Ug)Red. factor
12022-10-28 04-36-411FB1390.31447
22022-10-28 06-36-411.25FB1520.47326
32022-10-28 06-28-171LR1470.95155
42022-10-28 06-28-171.25LR1511.2129
52022-10-27 12-12-121.6FB1021.197
62022-10-27 12-28-541V4978.657
72022-10-27 12-12-122V481953
82022-10-28 06-28-171.6LR831.652
92022-10-28 06-36-412FB1142.742
102022-10-27 12-12-121.6V3478.541
112022-10-27 12-28-541.25V4111234
122022-10-27 12-12-122.5V3209.833
132022-10-28 06-28-172LR1074.325
142022-10-27 12-12-123.15V3381621
152022-10-27 12-12-124V4232021
162022-10-28 07-30-582.5LR864.320
172022-10-27 12-12-122.5FB914.620
182022-10-27 12-12-125V3422514
192022-10-27 12-12-123.15FB749.18.1
202022-10-27 12-12-126.3V425656.6
212022-10-27 12-12-124FB110186
Source: 2022-10-27 until 2022-10-28 Site Survey Report

Results

Summary Results

Below is a summary of the results:
- MB3000 PASSED the Vibration specifications

Detailed Results

TypePositionDirectionSpecificationMeasurementResult
VibrationFloorVerticalSee TableLinePASS
Front-BackLinePASS
Left-RightLinePASS
MB3000VerticalSee TableLinePASS
Front-BackLinePASS
Left-RightLinePASS

Data

Room 211B - Thermo Fisher Scientific Glacios 2 with Selectris

Vibration

Figure 2: Vibration (Vertical – TFS Specification)

Figure 3: Vibration (Vertical – Transmissibility)

Figure 4: Vibration (Vertical – Floor)

Figure 5: Vibration (Vertical – MB3000)

Figure 6: Vibration (Front-Back – TFS Specification)

Figure 7: Vibration (Front-Back – Transmissibility)

Figure 8: Vibration (Front-Back – Floor)

Figure 9: Vibration (Front-Back – MB3000)

Figure 10: Vibration (Left-Right – TFS Specification)

Figure 11: Vibration (Left-Right – Transmissibility)

Figure 12: Vibration (Left-Right – Floor)

Figure 13: Vibration (Left-Right – MB3000)

Figure 14: Installation Detail 1

Figure 15: Installation Detail 2

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date09-25-2023
Tags
DVIA-M Series
Installation Report
Thermo Fisher Scientific