Skip to main content
Installation Report
DVIA-M Series
06-11-2024

Thermo Fisher Scientific Glacios 2 Cryo-TEM DVIA-MB3000 Installation Report

DVIA-M Series
Installation Report
Thermo Fisher Scientific

Summary of Work

We re-tuned the passive system and verified performance.

We left the DIVA-MB3000 in position and turned on.

Location Information

This Daeil DIVA-MB3000 System was installed in room 0B 110.

System Information

Part DeliveredSerial NumberSoftwareInstalled
Daeil DIVA-MB3000201012R5Site-Specific TuneYES

Vibration Criterion

VEC conducted six vibration measurement surveys with a duration of 16 seconds each. This test was done on the slab floor and on the DIVA-MB3000 in one direction.

Conclusions

The Daeil DIVA-MB3000 active vibration isolation platform is appropriately installed and functioning as intended. After the Microscope was set up, the system’s resonant frequency changed, which reduced the spike we saw at 100 Hz. Many cables and hoses used with the

microscope bridge the “floating world” and the ground, causing the vibration between 8 and 60 Hz to rise as expected, but not above VC-G. Attached you will Find graphs from the last test and this test below.

Images and Data

Image 1: Equipment Picture

Figure 1: Vertical Floor

Figure 2: Vertical Daeil DIVA-MB3000

Figure 3: Vertical Transmissibility

Figure 4: 2nd Visit Vertical Floor

Figure 5: 2nd Visit Vertical Daeil DIVA-MB3000

Figure 6: 2nd Visit Vertical Transmissibility

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

Share this Case Study

Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date06-11-2024
Tags
DVIA-M Series
Installation Report
Thermo Fisher Scientific