Hitachi Regulus 8230 DVIA-U350 Installation Report

DVIA-U Series

Installation Report

Hitachi

Introduction

This report provides the details of the installation of the U350 for the Hitachi Regulus 8230 in 1Q14-01, Building 81, 974 East Arques Avenue, Sunnyvale, CA 94085. Applied Materials hired VEC to install the vibration isolation system and provide a report of the completed work.

Summary

Below is a summary of the results:

U350 ON PASSED the Vibration specifications

Product Details

Part Delivered	Serial Number	Software
U350	240614R2-4	-

Summary of Work

We installed the system by

- Positioning the modular platform under the microscope

We tested the system by

- Creating and uploading a site-specific tune

- Collecting vibration data to verify the performance

We left the system

- In position and turned on

Procedures

Vibration

VEC conducted vibration measurements in six directions. Acceleration measurements were taken at a bandwidth of 200Hz with units of um (Pk-Pk). The acceleration spectra with 200Hz bandwidths were recorded.

Setup

Vibration
Bandwidth	200Hz
Lines	3200
Window	Hanning
Coupling	AC SE
Average Type	Stable
Duration	60 seconds
Engineering Units	um (Pk-Pk)

Specifications

VEC used the following specifications for the project.

Specification Summary

Tool	Specification
Hitachi Regulus 8230	Vibration: All Directions VC-D

Results

Summary Results

Below is a summary of the results:

U350 ON PASSED the Vibration specifications

Detailed Results

Type	Position	Direction	Specification	Measurement	Result
Vibration	Floor	Vertical	VC-D	VC-B	✗ FAIL
		Left-Right	VC-D	VC-F	✓ PASS
		Front-Back	VC-D	VC-G	✓ PASS
	U 350	Vertical	VC-D	VC-E	✓ PASS
		Left-Right	VC-D	VC-F	✓ PASS
		Front-Back	VC-D	VC-E	✓ PASS

Data

Figure 1: Vibration (Vertical – Floor)

Figure 2: Vibration (Vertical – U 350)

Figure 3: Vibration (Vertical – Transmissibility)

Figure 4: Vibration (Left-Right – Floor)

Figure 5: Vibration (Left-Right – U 350)

Figure 6: Vibration (Left-Right – Transmissibility)

Figure 7: Vibration (Front-Back – Floor)

Figure 8: Vibration (Front-Back – U 350)

Figure 9: Vibration (Front-Back – Transmissibility)

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A