Hitachi SU8240(Room 1C06-01) DVIA-U350 Installation Report

DVIA-U Series

Installation Report

Hitachi

Introduction

This report provides the details of the installation of the U350 for the Hitachi SU8240 in 1C06-01, Building 81, 974 East Arques Avenue, Sunnyvale, CA 94085. Applied Materials hired VEC to install the vibration isolation system and provide a report of the completed work.

Summary

Below is a summary of the results:

U350 ON PASSED the Vibration specifications

Product Details

Part Delivered	Serial Number	Software
U350	240614R2-2	-

Summary of Work

We installed the system by

- Positioning the daeil under the microscope

We tested the system by

- Creating and uploading a site-specific tune

- Collecting vibration data to verify the performance

We left the system

- In position and turned on

Procedures

Vibration

VEC conducted vibration measurements in six directions. Acceleration measurements were taken at a bandwidth of 200Hz with units of um (Pk-Pk). The acceleration spectra with 200Hz bandwidths were recorded.

Setup

Vibration
Bandwidth	200Hz
Lines	3200
Window	Hanning
Coupling	AC SE
Average Type	Stable
Duration	60 seconds
Engineering Units	um (Pk-Pk)

Specifications

VEC used the following specifications for the project.

Specification Summary

Tool	Specification
Hitachi SU8240	Vibration: All Directions VC-D

Results

Summary Results

Below is a summary of the results:

U350 ON PASSED the Vibration specifications

Detailed Results

Type	Position	Direction	Specification	Measurement	Result
Vibration	Floor	Vertical	VC-D	VC-C	✗ FAIL
		Left-Right	VC-D	VC-F	✓ PASS
		Front-Back	VC-D	VC-F	✓ PASS
	U 350	Vertical	VC-D	VC-E	✓ PASS
		Left-Right	VC-D	VC-F	✓ PASS
		Front-Back	VC-D	VC-E	✓ PASS