Hitachi SU8000 FE-SEM DVIA-MB1000 Installation Report
1. Measurement Details
Measurement Date
April 27, 2019
Measurement Devices
1. LAN-XI Data Acquisition Hardware
– Brüel & Kjæ r 3050-B-040
2. Data Analysis Software
– Brüel & Kjæ r PULSE LAB SHOP 14
3. Sensors
– PCB Accelerometer
– Model: 393B05
Measurement Location
4
th
Floor
Measurement Setup
Bandwidth: 0 – 100 Hz
Lines: 400
Window: Hanning
Averaging: Fast Fourier Transform Spectrum Averaging
Amplitude Units: m/s2
Spectral Unit: RMS
2. Equipment Information
Manufacturer
HITACHI
Model
SEM SU8000
Floor Vibration Specification
VC-E
3. Vibration Isolation System Information
Model: DVIA-MB1000
| Model | DVIA-MB1000 | DVIA-MB3000 | DVIA-MB6000 |
|---|---|---|---|
| Platform Dimensions (L x W x H) | Custom-made | ||
| Load Capacity | 500 - 1700 kg | 1500 - 3500 kg | 3000 - 6000 kg |
| Actuator | Electromagnetic Actuator | ||
| Maximum Actuator Force | Vertical: 40 N, Horizontal: 20 N | Vertical: 80 N, Horizontal: 40 N | |
| Degrees of Freedom | 6 degrees | ||
| Active Isolation Range | 0.5 - 100 Hz | ||
| Vibration Isolation at 1 Hz | ≥90% | ||
| Input Voltage (V) | AC100 - 240V / 50 - 60 Hz / 1A | ||
| Power Consumption (W) | Maximum 110W, <50 W in normal operation | ||
| Operating Range | Temperature (°C) | 5 - 50 °C | |
| Humidity (%) | 20 - 90% | ||
| Required Air Pressure | ≥ 0.5 MPa (≥ 5 bar) |
4. Installation Photos
5. Results
VC Curves, Z-axis (Vertical)
AVI = Active Vibration Isolation
The active vibration isolation system reduced the vertical floor vibration from
VC-C
to
VC-G
.
VC Curves, X-axis (Left to Right)
AVI = Active Vibration Isolation
The active vibration isolation system reduced the vertical floor vibration from
VC-D
to
VC-E
.
VC Curves, Y-axis (Front to Back)
AVI = Active Vibration Isolation
The active vibration isolation system reduced the vertical floor vibration from
VC-C
to
VC-E
.
6. Reference
Generic Vibration Criteria
| Criterion Curve | Description | Amplitude µm/s (µin/s) | Detail Size µm |
|---|---|---|---|
| Workshop (ISO) | Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas. | 800 (32,000) | N/A |
| Office (ISO) | Perceptible vibration. Appropriate to offices and non-sensitive areas. | 400 (16,000) | N/A |
| Residential Area (ISO) | Barely perceptible vibration. Appropriate to sleep areas in most instances. | 200 (8,000) | 75 |
| Operating Theatre (ISO) | Vibration not perceptible. Suitable for surgical suites, microscopes to 100x. | 100 (4,000) | 25 |
| VC-A | Adequate for optical microscopes to 400x, microbalances, optical balances. | 50 (2,000) | 8 |
| VC-B | Appropriate for inspection and lithography equipment to 3μm line widths. | 25 (1,000) | 3 |
| VC-C | Appropriate for optical microscopes to 1000x, lithography equipment to 1μm. | 12.5 (500) | 1 - 3 |
| VC-D | Suitable for demanding equipment including electron microscopes (SEMs/TEMs). | 6.25 (250) | 0.1 - 0.3 |
| VC-E | For the most demanding systems including E-Beam lithography at nanometer scales. | 3.12 (125) | < 0.1 |
| VC-F | For extremely quiet research spaces. Not recommended as design criterion. | 1.56 (62.5) | N/A |
| VC-G | For extremely quiet research spaces. Not recommended as design criterion. | 0.78 (31.25) | N/A |
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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