Thermofisher Scientific PRISMA E SEM DVIA-MB1000 Installation Report
Overview
The DVIA-MB1000 active vibration isolation platform is appropriately installed and functioning as intended for Thermofisher Scientific PRISMA E SEM.
Contents
1. Measurement Details
Measurement Date: February 11, 2019
Measurement Devices:
LAN-XI Data Acquisition Hardware – Brüel & Kjær 3050-A-040 (Serial Number: 3050-111438)
Data Analysis Software – Brüel & Kjær PULSE LAB SHOP 22
Sensors – PCB Accelerometer Model: 393B05 (Serial Number: 48995, 40626)
Measurement Location: 4th Floor
Measurement Setup:
Bandwidth: 0 – 100 Hz
Lines: 400
Window: Hanning
Averaging: Fast Fourier Transform Spectrum Averaging
Amplitude Units: m/s²
Spectral Unit: RMS
2. Equipment Information
Manufacturer: Thermofisher Scientific
Model: PRISMA E SEM
Floor Vibration Specification: VC-E in Vertical and Horizontal Axis
3. Vibration Isolation System Information
Model: DVIA-MB1000
4. Summary
| Item | Z axis (Vertical) | X axis (Left to Right) | Y axis (Front to Back) |
|---|---|---|---|
| Frequency Range | 1 - 80 Hz | 1 - 80 Hz | 1 - 80 Hz |
| Floor Vibration Specification | VC-E | VC-E | VC-E |
| Floor Vibration | ✗ Fail | ✗ Fail | ✗ Fail |
| Vibration on AVI | ✓ Pass | ✓ Pass | ✓ Pass |
5. Results – Vibration Criterion Curves
VC Curves, Z-axis (Vertical)
VC Curves, X-axis (Left to Right)
VC Curves, Y-axis (Front to Back)
6. Results – Active Isolation Off vs Active Isolation On
7. Reference
Generic Vibration Criteria
*Notes:*
1. As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
2. Detail size refers to width in microelectronics fabrication or particle size in medical research.
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