Thermofisher Scientific Helios G4 UC DualBeam HR-S/TEM DVIA-MB1000 Installation Report
1. Measurement Details
Measurement Date
June 24, 2019
Measurement Devices
1. LAN-XI Data Acquisition Hardware
– Brüel & Kjæ r 3050-A-040 (Serial Number: 3050-111438)
2. Data Analysis Software
– Brüel & Kjæ r PULSE LAB SHOP 14
3. Sensors
– PCB Accelerometer
– Model: 393B05 (Serial Number: 48995, 40626)
Measurement Location
1
st
Floor
Measurement Setup
Bandwidth: 0 – 100 Hz
Lines: 400
Window: Hanning
Averaging: Fast Fourier Transform Spectrum Averaging
Amplitude Units: m/s2
Spectral Unit: RMS
2. Equipment Information
Manufacturer
FEL
Model
HELIOS G4 UC DualBeam System FIB S/TEM
Floor Vibration Specification
| Vertical | Left to right | Front to back |
|---|---|---|
| Helios G4 UX with or without enclosure, no HWL; 0.6nm; Stub, 0 Tilt | F | G |
| Helios G4 UX with or without enclosure, with HWL; 0.6nm; Stub, 0 Tilt | E | F |
| Helios G4 CX with or without enclosure, no HWL; 0.7 nm F (STEM) / 0.8 nm (no STEM); Stub, 0 Tilt | F | G |
| Helios G4 CX with or without enclosure, with HWL; 0.7 E nm (STEM) / 0.8 nm (no STEM); Stub, 0 Tilt | E | F |
| Helios G4 FX/HX with or without enclosure, no HWL; 0.6nm; Shuttle,0 Tilt | F | G |
| Helios G4 FX/HX with or without enclosure, with HWL; 0.6nm; Shuttle,0 Tilt | E | F |
3. Vibration Isolation System Information
Model: DVIA-MB3000
| Platform Dimensions | 1140 x 910 x 224 mm | |
|---|---|---|
| Load Capacity | 1500 - 3500 kg | |
| Actuator | Electromagnetic Actuator | |
| Maximum Actuator Force | Vertical: 40N, Horizontal: 20 N | |
| Degrees of Freedom | 6 degrees | |
| Active Isolation Range | 0.5 - 100 Hz | |
| Vibration Isolation at 2 Hz | ≥90% | |
| Vibration Isolation at 10 Hz | ≥90% | |
| Input Voltage (V) | AC100 - 240V / 50 - 60 Hz / 1A | |
| Power Consumption (W) | Maximum 110W, <50 W in normal operation | |
| Operating Range | Temperature (°C) | 5 - 50 °C |
| Humidity (%) | 20 - 90% | |
| Required Air Pressure | ≥ 0.5 MPa | |
4. Installation Photos
5. Summary
Floor Vibration Specification
---
| Frequency Range | 1 - 80 Hz | ||
|---|---|---|---|
| Floor Vibration Specification | VC-F | VC-G | VC-G |
| Measurement Direction | Z-axis | ||
| (Vertical) | X-axis | ||
| (Left to Right) | Y-axis | ||
(Front to Back)
| Floor Vibration | Fail | Fail | Fail | ||
|---|---|---|---|---|---|
| Vibration On Active Vibration Isolation System | Pass | Pass | Pass | ||
6. Results
Z-axis (Vertical)
The measured vertical floor vibration did not meet the vibration specification VC-F.
The active vibration isolation system reduced the vertical floor vibration from VC-D to VC-F.
X-axis (Left to Right)
The measured X-axis floor vibration did not meet the floor vibration specification VC-D.
The active vibration isolation system reduced the X-axis floor vibration from VC-D to VC-G.
Y-axis (Front to Back)
The measured Y-axis floor vibration did not meet the floor vibration specification VC-G.
The active vibration isolation system reduced the Y-axis floor vibration from VC-D to VC-G.
7. Reference
Generic Vibration Criteria
| Criterion Curve | Description | Amplitude µm/s (µin/s) | Detail Size µm |
|---|---|---|---|
| Workshop (ISO) | Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas. | 800 (32,000) | N/A |
| Office (ISO) | Perceptible vibration. Appropriate to offices and non-sensitive areas. | 400 (16,000) | N/A |
| Residential Area (ISO) | Barely perceptible vibration. Appropriate to sleep areas in most instances. | 200 (8,000) | 75 |
| Operating Theatre (ISO) | Vibration not perceptible. Suitable for surgical suites, microscopes to 100x. | 100 (4,000) | 25 |
| VC-A | Adequate for optical microscopes to 400x, microbalances, optical balances. | 50 (2,000) | 8 |
| VC-B | Appropriate for inspection and lithography equipment to 3μm line widths. | 25 (1,000) | 3 |
| VC-C | Appropriate for optical microscopes to 1000x, lithography equipment to 1μm. | 12.5 (500) | 1 - 3 |
| VC-D | Suitable for demanding equipment including electron microscopes (SEMs/TEMs). | 6.25 (250) | 0.1 - 0.3 |
| VC-E | For the most demanding systems including E-Beam lithography at nanometer scales. | 3.12 (125) | < 0.1 |
| VC-F | For extremely quiet research spaces. Not recommended as design criterion. | 1.56 (62.5) | N/A |
| VC-G | For extremely quiet research spaces. Not recommended as design criterion. | 0.78 (31.25) | N/A |
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
Share this Case Study
Case Study Information
Related Case Studies
YIMO Ningde era Thermo Fisher Apreo 2S DVIA-MB1000 (240103R5) Installation Report
YIMO Anhui University Thermo Fisher Hellos 5 UC DVIA-MB1000 (240119R4-1) Installation Report
