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Installation Report
DVIA-M Series
09-17-2010

Thermo Fisher Scientific Scios 2 DualBeam FIB SEM DVIA-MB1000 Installation

DVIA-M Series
Installation Report
Thermo Fisher Scientific

Contents

Measurement Details

ItemDetails
Measurement DateSeptember 17, 2010
Measurement Location6th Floor

Measurement Devices

DeviceModel
LAN-XI Data Acquisition HardwareBrüel & Kjær 3050-B-040
Data Analysis SoftwareBrüel & Kjær PULSE LAB SHOP 14
SensorsPCB Accelerometer, Model: 393B05

Equipment Information

ItemDetails
ManufacturerThermo Fisher
ModelFIB-SEM Scios 2

Vibration Isolation System

DVIA-MB1000

Installation Photo

Results

Z-axis (Vertical)

Frequency RangeFloor VibrationWith AVI
1 – 10 HzVC-BVC-E
10 – 80 HzVC-BVC-F
AVI = Active Vibration Isolation

X-axis (Left to Right)

Frequency RangeFloor VibrationWith AVI
1 – 10 HzVC-DVC-F
10 – 80 HzVC-EVC-G
AVI = Active Vibration Isolation

Y-axis (Front to Back)

Frequency RangeFloor VibrationWith AVI
1 – 10 HzVC-DVC-G
10 – 80 HzVC-EVC-G
AVI = Active Vibration Isolation

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date09-17-2010
Tags
DVIA-M Series
Installation Report
Thermo Fisher Scientific

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