DVIA-ULF1000 Huasheng Lianying Vibration Damping Platform Installation Report

DVIA-ULF Series

Installation Report

YIDONG

Overview

The system has a history in which the DVIA-ULF1000 model was replaced with the DVIA-ML1000 model due to poor SEM image quality.

However, even after applying the DVIA-ML1000, the SEM image quality did not improve, and the issue was ultimately concluded to originate from the SEM itself rather than the vibration isolation table

Accordingly, the DVIA-ULF1000 model was reinstalled, and tuning was performed.

Vibration Isolation System Information

Model: DVIA-ULF1000

Serial Number: 250813R2

Engineer

Chaewon Lee DAEIL SYSTEMS

Tuning Date

December 29, 2025

End User

Huasheng Lianying Vibration Damping Platform

Number of Tuning Trial

7th

Location

Wuxi, China

Equipment

Manufacturer: YIDONG

Equipment: FE-SEM

Model: YF-1801

Equipment Condition

The equipment is turned on/IDLE

Tuning Request

N/A

Measurement Summary

Measurement Point	Status	Axis	Measurement Data
Measurement Point	Status	Axis	Floor	DVIA-ULF1000
1.Floor 2.DVIA-ULF1000	YF-1801 is turned on/IDLE	Vertical	VC-E @ 2.5 Hz	VC-G @ 2.5 Hz
		Left to Right	VC-E @ 2 Hz	VC-F @ 2 Hz
		Front to Back	VC-D @ 1.6 Hz	VC-G @ 1.6 Hz

Measurement Data Obtained via UI Program

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment picture

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A