DVIA-ULF1000 Huasheng Lianying Vibration Damping Platform Installation Report — 5th tuning (Dec 2025)

DVIA-ULF Series

Installation Report

YIDONG

Overview

Tuning was performed with the DVIA-ULF1000 units installed beneath the equipment’s lower frame.

A re-tuning was conducted due to an issue where the equipment’s image appeared unstable.

When the pump operates, a strong resonance peak occurs around 80 Hz. To achieve better performance, the pump issue must be resolved.

Model: DVIA-ULF1000

Serial Number: 250813R2

Chaewon Lee from DAEIL SYSTEMS

December 01, 2025

Huasheng Lianying Vibration Damping Platform

5th

Wuxi, China

Manufacturer: YIDONG

Equipment: FE-SEM

Model: YF-1801

The equipment is turned on/IDLE

N/A

Measurement Point	Status	Axis	Measurement Data
Measurement Point	Status	Axis	Floor	DVIA-ULF1000
1.Floor 2.DVIA-ULF1000	YF-1801 is turned on/IDLE	Vertical	VC-E @ 3.15 Hz	VC-G @ 3.15 Hz
		Left to Right	VC-E @ 2.5 Hz	VC-F @ 2.5 Hz
		Front to Back	VC-F @ 2.5 Hz	VC-G @ 2.5 Hz

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A