Installation Report

DVIA-T Series

06-17-2026

Robocube Tech 6-Axis Actuator DVIA-T87 (260423R2) Installation Report

DVIA-T Series

Installation Report

Robocube Tech

6-Axis Actuator

DVIA-T87

260423R2

Author

Donggyu Park · DAEIL SYSTEMS

Installation Date

June 17, 2026

Report Written Date

June 17, 2026

Overview

Tuning and vibration measurement were carried out after the DVIA-T87 was installed.

Inspection and vibration measurement were carried out with the unit in the IDLE state.

The data are presented as VC Curves, together with reference material on vibration levels.

Vibration Isolation Platform

Model: DVIA-T87

Serial number: 260423R2

Engineer

Donggyu Park · DAEIL SYSTEMS

Tiheon Kim · DAEIL SYSTEMS

Tuning Date

June 17, 2026

Installation Site

Robocube Tech assembly room

End User

Robocube Tech

Customer Equipment

Manufacturer: Robocube Tech

Equipment: 6-axis actuator (for internal review)

Model: In-house equipment

Vibration Specification

Equipment Status

IDLE

Vibration Measuring Equipment

10.1) Measurement Equipment

Hardware: B&K Front End Type 3050-A-040

Software: B&K Pulse Labshop 22 Version

10.2) Accelerometer

PCB 393B05

Vibration Measurement Setup

F Span: 200 Hz

Lines: 2400

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Conclusion

On the Z, X and Y axes alike, vibration on the top plate was confirmed to be attenuated relative to the floor vibration.

Measurement Summary

Measurement Point	Vibration Specification	Axis	Measurement Result
Measurement Point	Vibration Specification	Axis	Floor	DVIA-T87
1. Floor 2. DVIA-T87	-	Vertical (Z-axis)	✓ PASS	✓ PASS
		Left to Right (X-axis)	✓ PASS	✓ PASS
		Front to Back (Y-axis)	✓ PASS	✓ PASS

Measurement Data

Z-axis — Autospectrum

Z-axis — VC Curves

X-axis — Autospectrum

X-axis — VC Curves

Y-axis — Autospectrum

Y-axis — VC Curves

Reference

The table below classifies vibration levels according to IEST-RP-CC012.2.

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

3. The information given in this table is for reference. In most cases it is advisable to seek the advice of a specialist familiar with the application and the vibration requirements of the equipment and the process.