Cosmo AM&T Bruker Contour X-500 Optical Profilometer DVID-C (260415R2) Installation Report
Contents
Author
Donggyu Park · DAEIL SYSTEMS
Installation Date
2026.08.05
Report Written Date
2026.08.10
Overview
Vibration measurement was carried out on the DVID-C installed at Cosmo AM&T.
Inspection and vibration measurement were carried out with the equipment installed and Turned on.
The data are presented as VC Curves, together with reference material on vibration levels.
Vibration Isolation Platform
Model: DVID-C
Serial number: 260415R2
Engineer
Donggyu Park · DAEIL SYSTEMS
Gyumin Park · DAEIL SYSTEMS
Tuning Date
2026.08.05
Installation Site
Cosmo AM&T
End User
Customer: Cosmo AM&T (Bruker Korea)
Customer Equipment
Manufacturer: Bruker
Equipment: Optical Profilometer
Model: Contour X-500
Vibration Specification
VC-B
Equipment Status
Equipment installed and Turned on/IDLE
Vibration Measuring Equipment
10.1) Measurement Equipment
Hardware: B&K Front End Type 3040-A-040
Software: B&K Pulse Labshop22 Version
10.2) Accelerometer
PCB 393B05
Vibration Measurement Setup
F Span: 200 Hz
Lines: 2400
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Conclusion
Vibration measurement was performed on the DVID-C (S/N 260415R2) installed at Cosmo AM&T and on the floor beneath it.
On all three axes — vertical (Z-axis), left to right (X-axis) and front to back (Y-axis) — the vibration level of both the floor and the DVID-C top plate fell below the VC-B criterion line, so every axis satisfied the specification.
The floor vibration by itself already satisfies VC-B, which is a favourable environment, and after the DVID-C was installed no peak exceeding the criterion was observed across the whole frequency band. The requirement of the customer equipment (Bruker Optical Profilometer, Contour X-500) for its vibration environment is therefore judged to be met.
Measured values may, however, vary with the surrounding conditions at the time of measurement (operation of adjacent equipment, foot traffic, air-conditioning status, and so on).
Measurement Summary
| Measurement Point | Vibration Specification | Axis | Measurement Result | |
|---|---|---|---|---|
| Floor | DVID-C | |||
| 1. Floor 2. DVID-C | VC-B | Vertical (Z-axis) | ✓ PASS | ✓ PASS |
| Left to Right (X-axis) | ✓ PASS | ✓ PASS | ||
| Front to Back (Y-axis) | ✓ PASS | ✓ PASS | ||
Measurement Data
Z-axis — VC Curves
X-axis — VC Curves
Y-axis — VC Curves
Reference
The table below classifies vibration levels according to IEST-RP-CC012.2.
Notes:
1. As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).
2. The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is to imaging associated with probe technologies, AFMs, and nanotechnology.
3. The information in this table is provided for reference. In most cases it is advisable to seek the advice of a specialist familiar with the application and the vibration requirements of the equipment and process.
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