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Installation Report
DVIA-ULF Series
03-10-2026

Tier-1 Semiconductor Icheon P&T PKG Analysis Lab DVIA-ULFB700 Installation Report

DVIA-ULF Series
Installation Report
Tier-1 Semiconductor

Contents

Overview

Vibration Isolation System Information

Model: DVIA-ULFB700

Serial Number: 260211R2

Engineer

Chaewon Lee from DAEIL SYSTEMS

Tuning Date

N/A

Installation Site

N/A

End User

Tier-1 Semiconductor

Equipment

N/A

Equipment Specification

N/A

Equipment Status

Turned off

Measuring Equipment

10.1) Data Physics DAQ

-Hardware: QUATTRO, Serial Number: 22436

-Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

Vertical: At 100 Hz, VC-B vibrations attenuate down to VC-D.

Left to Right: At 50 Hz, VC-B vibrations attenuate down to VC-E.

Front to Back: Operating Theatre vibrations at 31.5 Hz attenuate down to VC-E.

Effective vibration isolation performance was confirmed in every direction.

Measurement Data

Measurement siteStatusAxisFloor vibrationDVIA-ULFB700
Tier-1 Semiconductor Icheon P&T site, P&T 4 PKG analysis laboratory
1. Floor vibration
2. DVIA-ULFB700		Turned offVerticalVC-B @ 100 HzVC-D @ 100 Hz
Left to RightVC-B @ 50 HzVC-E @ 50 Hz
Front to BackOperating Theatre @ 31.5 HzVC-E @ 31.5 Hz

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Reference

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

*Notes:*

1. VC-A/B are measured at one-third octave bands over 8-80 Hz; VC-C through VC-G are measured over 1-80 Hz.

2. Detail size refers to linewidth in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-ULF Series
Date03-10-2026
Tags
DVIA-ULF Series
Installation Report
Tier-1 Semiconductor

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