Installation Report

DVIA-ULF Series

12-12-2025

69 Ministry of Defense Thermo Fisher Scientific SEM Prisma DVIA-ULF700 Installation Report — Ho Chi Minh (251023R8)

DVIA-ULF Series

Installation Report

Thermo Fisher Scientific

SEM Prisma

Vietnam

DVIA-ULF700

251023R8

Prepared for

69 Ministry of Defense

Prepared by

Engineer: Chaewon Lee

Tuning date: 25.12.11

Report written date: 25.12.12

Overview

The DVIA-ULF700 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-ULFB700

Serial Number: 251023R8

Engineer

Chaewon Lee DAEIL SYSTEMS

Tuning Date

December 11, 2025

End User

69 Ministry of Defencse

Number of Tuning Trial

1st

Location

Ho chi Minh, Vietnam

Equipment

Manufacturer: Thermo Fisher Scientific

Equipment: SEM

Model: Prisma

Equipment Condition

The equipment is turned on/IDLE

Measurement Summary

Measurement Point	Status	Axis	Floor	DVIA-ULF700
1.Floor 2.DVIA-ULF700	Prisma installed/turned off	Vertical	VC-D @ 3.15 Hz	VC-G @ 3.15 Hz
		Left to Right	VC-E @ 3.15 Hz	VC-G @ 3.15 Hz
		Front to Back	VC-E @ 2 Hz	VC-G @ 2 Hz

Measurement Data Obtained via UI Program

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment picture

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A