Installation Report

DVIA-P Series

01-12-2026

Seoul National University JEOL JBX-8100FS DVIA-P4000 Installation Report

DVIA-P Series

Installation Report

Seoul National University

JEOL

JBX-8100FS

Overview

Tuning and vibration measurement were performed on the DVIA-P4000 installed at Seoul National University Inter-University Semiconductor Research Center Cleanroom C2-4.

Tuning and vibration measurement were conducted with the equipment in Turned off state.

Data are presented as VC Curves, along with reference materials for vibration level assessment.

Vibration Isolation System Information

Model: DVIA-P4000

Serial Number: 250808R1

Engineer

Chaewon Lee from DAEIL SYSTEMS

Measurement Date

January 12, 2026

Installation Site

N/A

End User

Seoul National University

Equipment

Manufacturer: JEOL

Equipment: Electron Beam Lithography

Model: JBX-8100FS

Equipment specification

Equipment Status

장비 설치 및 Turned off

Measuring Equipment

10.1) Data Physics DAQ

-Hardware: QUATTRO, Serial Number: 22436

-Software: SignalCalc ACE

10.2) Accelerometer

- PCB Accelerometer

- Model: 393B05

Measuring Set-up

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

Meets vibration specifications in all directions.

Measurement Data

Measurement site	State	Direction	Measurement Data	Measurement Data	Result	Result
Measurement site	State	Direction	Floor	DVIA-P4000	Floor	DVIA-P4000
Seoul National University Inter-University Semiconductor Research Center Cleanroom C2-4 1. Floor 2. DVIA-P4000	Turned off	Vertical	VC-B @ 63 Hz	VC-E @ 63 Hz	✗ FAIL	✓ PASS
		Left to Right	VC-D @ 63 Hz	VC-G @ 63 Hz	✗ FAIL	✓ PASS
		Front to Back	VC-D @ 63 Hz	VC-G @ 63 Hz	✓ PASS	✓ PASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospecturm

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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