Ningbo Institute of Materials EVAN Scanning Auger Electron Spectrometer DVIA-M1000 (250526R4) Installation Report

DVIA-M Series

Installation Report

Ningbo Institute of Materials

EVAN

Hangzhou

Scanning Auger Electron Spectrometer

DVIA-M1000

DVIA-ML1000

Overview

The DVIA-ML1000 active vibration isolation platform is appropriately installed and functioning as intended.

Model: DVIA-ML1000

Serial Number: 250526R4

Chaewon Lee from DAEIL SYSTEMS

July 02, 2025

July 02, 2025

1st

Hangzhou, China

Ningbo Institute of Materials

Manufacturer: EVAN

Equipment: Scanning Auger Electron Spectrometer

Model: -

The equipment is installed/Turned off

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A