Installation Report

DVIA-M Series

04-13-2026

Shanghai Jiao Tong University Hitachi SU8600 FE-SEM DVIA-M1000 (250320R3) Installation Report

DVIA-M Series

Installation Report

Shanghai Jiao Tong University

Hitachi

FE-SEM

SU8600

DVIA-M1000

DVIA-ML1000

Shanghai

Overview

The DVIA-ML1000 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-ML1000

Serial Number: 250320R3

Engineer

Chaewon Lee DAEIL SYSTEMS

Tuning Date

April 10, 2026

Report written date

April 13, 2026

End User

Shanghai Jiao Tong University

Number of Tuning Trial

1st

Location

Shanghai, China

Equipment

Manufacturer: Hitachi

Equipment: FE-SEM

Model: SU8600

Vibration specification

Equipment Condition

The equipment is turned on/IDLE

Tuning Request

N/A

Measurement Summary

Measurement Point	Status	Axis	Vibration Specification	Floor	DVIA-ML1000	Result	Result
1.Floor 2.DVIA-ML1000	Equipment is Turned on/IDLE	Vertical	Refer to item 9	0.97 @ 2.52 Hz	0.071 @ 2.52 Hz	✓ PASS	✓ PASS
		Left to Right		0.76 @ 1.13 Hz	0.14 @ 1.13 Hz	✓ PASS	✓ PASS
		Front to Back		1.05 @ 1.13 Hz	0.25 @ 1.13 Hz	✓ PASS	✓ PASS

Measurement Data Obtained via UI Program

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment picture

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A