Installation Report
DVIA-M Series
04-15-2025
YIMO Zeiss FE-SEM Sigma360 DVIA-M1000 (250220R1) Installation Report
DVIA-M Series
Installation Report
YIMO
DVIA-M1000
250220R1
Zeiss
Sigma360
FE-SEM
Beijing
Contents
Overview
The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.
Vibration Isolation System Information
Model: DVIA-M1000
Serial Number: 250220R1
Engineer
Jonghwa Suh from DAEIL SYSTEMS
Tuning Date
April 14, 2025
Report written date
25.04.15
Number of Tuning Trial
1st
Location
Beijing
End User
Ulysse
Equipment
Manufacturer: Zeiss
Equipment: FE-SEM
Model: Sigma360
Equipment Condition
The equipment is installed/IDLE
Tuning Request
Data and Image
Vertical Transmissibility
Left to Right Transmissibility
Front to Back Transmissibility
Equipment
Generic Vibration Criteria
| Criterion Curve | Description | Amplitude µm/s (µin/s) | Detail Size µm |
|---|---|---|---|
| Workshop (ISO) | Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas. | 800 (32,000) | N/A |
| Office (ISO) | Perceptible vibration. Appropriate to offices and non-sensitive areas. | 400 (16,000) | N/A |
| Residential Area (ISO) | Barely perceptible vibration. Appropriate to sleep areas in most instances. | 200 (8,000) | 75 |
| Operating Theatre (ISO) | Vibration not perceptible. Suitable for surgical suites, microscopes to 100x. | 100 (4,000) | 25 |
| VC-A | Adequate for optical microscopes to 400x, microbalances, optical balances. | 50 (2,000) | 8 |
| VC-B | Appropriate for inspection and lithography equipment to 3μm line widths. | 25 (1,000) | 3 |
| VC-C | Appropriate for optical microscopes to 1000x, lithography equipment to 1μm. | 12.5 (500) | 1 - 3 |
| VC-D | Suitable for demanding equipment including electron microscopes (SEMs/TEMs). | 6.25 (250) | 0.1 - 0.3 |
| VC-E | For the most demanding systems including E-Beam lithography at nanometer scales. | 3.12 (125) | < 0.1 |
| VC-F | For extremely quiet research spaces. Not recommended as design criterion. | 1.56 (62.5) | N/A |
| VC-G | For extremely quiet research spaces. Not recommended as design criterion. | 0.78 (31.25) | N/A |
Notes:
As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
Detail size refers to width in microelectronics fabrication or particle size in medical research.
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date04-15-2025
Tags
DVIA-M Series
Installation Report
YIMO
DVIA-M1000
250220R1
Zeiss
Sigma360
FE-SEM
Beijing
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