KYKY SEM EM-8200 DVIA-ML1000 (250107R5) Installation Report

DVIA-M Series

Installation Report

SEM

KYKY

EM-8200

DVIA-ML1000

250107R5

Overview

The DVIA-ML1000 active vibration isolation platform is appropriately installed and functioning as intended.

Model: DVIA-ML1000

Serial Number: 250107R5

Chaewon Lee

26.03.11

26.03.24

N/A

1st

N/A

Manufacturer: KYKY

Equipment: SEM

Model: EM-8200

The equipment is turned off

Measurement Point	Status	Axis		Measurement Data
Measurement Point	Status	Floor	DVIA-ML1000
1.Floor 2.DVIA-ML1000	Equipment is Turned off	Vertical	VC-C @ 25 Hz	VC-G @ 25 Hz
	Left to Right	VC-E @ 25 Hz	VC-G @ 25 Hz
	Front to Back	VC-E @ 25 Hz	VC-G @ 25 Hz

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A