Thermo Fisher Spectra 300 TEM DVIA-MB3000 (240415R3-2) — Shenzhen Weiguang, 2024-06-13

DVIA-M Series

Installation Report

Shenzhen Weiguang

Thermo Fisher

Spectra 300

TEM

DVIA-MB3000

240415R3-2

Shenzhen

深圳卫光 (Shenzhen Weiguang)

(MB3000_ 240415R3-2 Set up)

Target equipment	Thermo Fisher Spectra 300
Place of installation	深圳市
Remark	Good Performance
END USER	深圳卫光
Operator: Byeonghun Cho Date of setup: 24.06.13 Date of reporting: 24.07.05	Date of business trip : 17.12.27~17.12.29
	Date of business trip : 17.12.27~17.12.29
Overview The DVIA-MB3000 active vibration isolation platform is appropriately installed and functioning as intended. Measurement date: 2024.06.13 (Thursday) Operator: Byeonghun Cho from DAEIL SYSTEMS Place of measurement: 深圳市 Equipment Model: Manufacturer: Thermo Fisher Equipment: TEM Model: Spectra 300	5.

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.