Skip to main content
Installation Report
DVIA-M Series
07-25-2024

Thermo Fisher Scientific Spectra 300 S/TEM DVIA-STONE-300 (240415R3-1) internal program performance report

DVIA-M Series
DVIA-STONE-300
Installation Report
Thermo Fisher Scientific
Spectra 300
240415R3-1
S/TEM

Contents

(STONE-300_ 240415R3-1 Set up)

Target equipmentThermo Fisher Spectra 300
Place of installationN/A
RemarkGood Performance
END USERN/A

Operator: Chaewon Lee

Date of setup: 24.07.25

Date of reporting: 24.08.07

Date of business trip : 17.12.27~17.12.29

Overview

The DVIA-STONE-300 active vibration isolation platform is appropriately installed and functioning as intended.

Measurement date

2024.07.25 (Wednesday)

Operator: Chaewon Lee from DAEIL SYSTEMS

Place of measurement: N/A

Equipment Model

Manufacturer: Thermo Fisher Scientific

Equipment: S/TEM

Model: Spectra 300

STONE-300 internal program performance measurement result

Vertical

Left to Right

Front to Back

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

Share this Case Study

Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date07-25-2024
Tags
DVIA-M Series
DVIA-STONE-300
Installation Report
Thermo Fisher Scientific
Spectra 300
240415R3-1
S/TEM

Related Case Studies

Thermo Fisher Spectra 300 S/TEM DVIA-STONE-300 — Shenzhen Weiguang, 2024-11-05
DVIA-M Series

Thermo Fisher Spectra 300 S/TEM DVIA-STONE-300 — Shenzhen Weiguang, 2024-11-05

11-06-2024Read more
DVIA-STONE-300 (240413R3-1) Thermo Fisher Spectra 300 S/TEM — Internal Program Set-up (measurement 2024.11.05)
DVIA-M Series

DVIA-STONE-300 (240413R3-1) Thermo Fisher Spectra 300 S/TEM — Internal Program Set-up (measurement 2024.11.05)

11-05-2024Read more
Institute of Semiconductors CAS Spectra 300 TEM DVIA-STONE-300 (241119R1) Installation Report
DVIA-M Series

Institute of Semiconductors CAS Spectra 300 TEM DVIA-STONE-300 (241119R1) Installation Report

06-09-2025Read more