DVIA-M1000 MB1000 Internal Program Measurement (230509R6-1) — 2024.05.28

DVIA-M Series

Installation Report

DVIA-M1000

MB1000

230509R6-1

Internal Program

(M1000_ 230509R6-1)

Target equipment: N/A

Place of installation: N/A

Remark: Good Performance

END USER: N/A

Operator: Chaewon Lee

Date of setup: 24.05.28

Date of reporting: 24.07.05

Date of business trip : 17.12.27~17.12.29

Overview

Overview The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended. Measurement date: 2024.05.28(Tuesday) Operator: Chaewon Lee from DAEIL SYSTEMS Place of measurement: N/A Equipment Model: N/A

MB1000 internal program performance measurement result

Vertical

Left to Right

Front to Back

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A