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Installation Report
DVIA-M Series
09-26-2023

Schrodinger Thermo Fisher Scientific Glacios 2 with Selectris DVIA-MB3000 (230418R3) Installation Report — 2023.09.26

DVIA-M Series
Installation Report
Schrodinger
Thermo Fisher Scientific
Glacios 2
DVIA-MB3000
230418R3

Overview

The DVIA-MB3000 active vibration isolation platform has been installed appropriately and meets the vibration specifications.

Vibration Isolation System Information

Model: DVIA-MB3000

Serial Number: 230418R3

Engineer

Jongwon Park from DAEIL SYSTEMS

Tuning Date

September 26, 2023

Report written date

2023.10.25

Date of business trip

Date of business trip : 17.12.27~17.12.29

Location

200 Staples Dr. Unit 210 Framingham, MA 01702 USA

Equipment

Thermo Fisher Scientific Glacios 2 with Selectris

Summary of Vibration Results

Measurement Point

VC curves

Z-axis (Vertical)

1-10 Hz

Z-axis (Vertical)

10-80 Hz

X-axis

(Left to Right)

1-10 Hz

X-axis

(Left to Right)

10-80 Hz

Y-axis (Front to Back)

1-10 Hz

Y-axis (Front to Back)

10-80 Hz

Floor

C

A

D

C

D

C

DVIA-MB3000

G

D

F

F

G

G

Data and Image

8.1 UI Program Transmissibility — Z-axis (Vertical)

8.1 UI Program Transmissibility — X-axis (Left to Right)

8.1 UI Program Transmissibility — Y-axis (Front to Back)

VEC Measurement

Z-axis (Vertical) Transmissibility

Z-axis (Vertical) Floor VC Curve

Z-axis (Vertical) Active VC Curve

X-axis (Left to Right) Transmissibility

X-axis (Left to Right) Floor VC Curve

X-axis (Left to Right) Active VC Curve

Y-axis (Front to Back) Transmissibility

Y-axis (Front to Back) Floor VC Curve

Y-axis (Front to Back) Active VC Curve

8.3 Installed equipment photo (1)

8.3 Installed equipment photo (2)

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date09-26-2023
Tags
DVIA-M Series
Installation Report
Schrodinger
Thermo Fisher Scientific
Glacios 2
DVIA-MB3000
230418R3