Installation Report

DVIA-M Series

09-13-2022

Zeiss GeminiSEM 360 DVIA-ML1000 Installation Report (Yancheng Fudi Battery, 2022-09-13)

DVIA-M Series

Installation Report

Zeiss

GeminiSEM 360

DVIA-ML1000

Yancheng

Target equipment

Zeiss GeminiSEM 360

Place of installation

YANCHENG

Remark

Good Performance

End user

Yancheng Fudi Battery Co., Ltd

Operator

Operator: Yu, Ho Sang

Date of setup

22.09.07

Date of reporting

22.09.13

Date of business trip

17.12.27~17.12.29

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended. Measurement date: 2022.09.07 (Wednesday), Operator: DAEIL SYSTEMS, Hosang Yu Place of measurement: YANCHENG Equipment Model: Zeiss GeminiSEM 360

DVIA-M1000

Model: DVIA-M1000

Serial number: 220630R3

MB1000 internal program performance measurement result

Z axis

X axis

Y axis

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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