Installation Report
DVIA-M Series
02-06-2023
Institute of Semiconductors (CAS) Helios G5 Langfang DVIA-M1000 Installation Report
DVIA-M Series
Installation Report
Helios
DVIA-M1000
DVIA-M
CAS
Thermo Scientific
Contents
Equipment picture
Target equipment
| Target equipment | Helios G5 |
|---|---|
| Place of installation | LANGFANG |
| Remark | Good Performance |
| END USER | Institute of Semiconductors,CAS |
Target equipment
Helios G5
Place of installation
LANGFANG
Remark
Good Performance
END USER
Institute of Semiconductors,CAS
Operator
| Operator: Yu, Ho Sang Date of setup: 23.02.01 Date of reporting: 23.02.06 | Date of business trip : 17.12.27~17.12.29 |
|---|
Operator: Yu, Ho Sang
Date of setup: 23.02.01
Date of reporting: 23.02.06
Date of business trip : 17.12.27~17.12.29
Overview
The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.
Measurements
Measurement date: 2023.02.01 (Wednesday),
Operator: DAEIL SYSTEMS, Hosang Yu
Place of measurement: LANGFANG
Equipment Model: Helios G5
5.
MB1000 internal program performance measurement result
Z axis
X axis
Y axis
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date02-06-2023
Tags
DVIA-M Series
Installation Report
Helios
DVIA-M1000
DVIA-M
CAS
Thermo Scientific
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