Jiangsu Longda Superalloy DVIA-M1000 (220329R4) Installation Report (2023)

DVIA-M Series

Installation Report

DVIA-M1000

DVIA-ML1000

220329R4

Jiangsu Longda

MB1000

END USER

Jiangsu Longda Superalloy Co., Ltd.

M1000_ 220329R4 Set up

Target equipment	N/A
Place of installation	JIANGSU
Remark	Good Performance
END USER	Jiangsu Longda Superalloy Co., Ltd.

Model: DVIA-M1000

Serial number: 220329R4

Operator: Lee, Young Ha

Date of setup: 23.04.18

Date of reporting: 23.04.

Date of business trip: 17.12.27~17.12.29

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

2023.04.18 (Tuesday)

Operator: DAEIL SYSTEMS, Youngha Lee

JIANGSU

N/A

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A