Installation Report
DVIA-M Series
04-20-2021
Thermo Fisher Scientific NXQ8000 Mask Aligner DVIA-MB1000 remote VEC (210302R3) Installation Report — 2021.04.20
DVIA-M Series
Installation Report
VEC
DVIA-MB1000
Thermo Fisher Scientific
NXQ8000
Mask Aligner
210302R3
remote
Contents
Equipment Picture
Target equipment
THERMO FISCHER NXQ8000 Mask Aligner
Place of installation
Thermo Fisher Scientific, CA (B1)
Remark
Good Performance
END USER
Thermo Fisher Scientific
Operator
Operator: Doohyun Kim
Date of setup : 21.04.16
Date of reporting : 21.04.20
Date of business trip : 17.12.27~17.12.29
Overview
After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.
Measurement details
Measurement date: 21.04.08 (Thu)
Operator: Daeil System, Research engineer Doohyun Kim
Place of measurement : Thermo Fisher Scientific, CA (B1)
Equipment Model: THERMO FISCHER NXQ8000 Mask Aligner
Measurement conditions and results
Summary of measurement results
| Test Condition | Transmissibility | 2 Hz | 5 Hz | 10 Hz |
|---|---|---|---|---|
| Transmissibility | Z | -16 dB | -21 dB | -28 dB |
| X | -1 dB | -15 dB | -18 dB | |
| Y | -10 dB | -25 dB | -28 dB | |
| Test Condition | VC Class | Floor | Top Plate | |
| VC Class | Z | B | F | |
| X | D | G | ||
| Y | D | G |
Good omnidirectional performance.
MB1000 internal program performance measurement result
MB1000 internal program — Z axis
MB1000 internal program — X axis
MB1000 internal program — Y axis
VEC Measurement Data
VEC Measurement Data — Z Axis
VEC Measurement Data — X Axis
VEC Measurement Data — Y Axis
Share this Case Study
Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date04-20-2021
Tags
DVIA-M Series
Installation Report
VEC
DVIA-MB1000
Thermo Fisher Scientific
NXQ8000
Mask Aligner
210302R3
remote
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