Installation Report

DVIA-M Series

12-04-2020

YIMO TESCAN DVIA-MB1000 Installation Report — onsite measurement (SN 200521R4, 2020-12-04)

DVIA-M Series

Installation Report

YIMO

TESCAN

DVIA-MB1000

DVIA-ML1000

SEM

Equipment picture

Target equipment

TESCAN

Place of installation

N/A

Remark

Good Performance

END USER

N/A

Operator

Choim, HyoungMun

Date of setup

20.12.01

Date of reporting

20.12.04

Date of business trip

17.12.27~17.12.29

Overview

After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.

Measurement date: 20.12.01 (TUE)

Operator: Daeil System, Research engineer Choim, HyoungMun

Place of measurement : N/A

Equipment Model: TESCAN

Measurement conditions and results

Summary of measurement results

Test Condition	Transmissibility
	2 Hz	5 Hz	10 Hz
Z	-22 dB	-20 dB	-30 dB
X	-20 dB	-20 dB	-30dB
Y	-15 dB	-15 dB	-33dB

Good omnidirectional performance.

MB1000 internal program performance measurement result

Z axis

X axis

Y axis

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

Share this Case Study

Case Study Information

Related Case Studies

DVIA-M Series

Beijing Software Testing DVIA-MB1000 Thermo Scientific Scios 2 Remote measurement — Internal program Z/X/Y plots (SN 191211R4 · P154) — 2020.08.28

08-28-2020Read more

DVIA-M Series

YIMO ZEISS Gemini Sigma 300 DVIA-MB1000 Installation Report (MB1000 P155, 2020-05-08)

05-08-2020Read more

DVIA-M Series

YIMO Thermo Fisher Scientific SEM Apreo 2S DVIA-MB1000 (250421R8) Installation Report

11-18-2025Read more