Institute for Basic Science NIKON ECLIPSE DVIA-UD350 (P15) Performance Report
Contents
Institute for Basic Science (UD350_P15 Set_Up)
Site checklist
| Target equipment | NIKON_ECLIPSE |
|---|---|
| Place of installation | Institute for Basic Science, 2nd floor analysis lab |
| Remark | Vibration isolation performance is good |
| END USER | Institute for Basic Science |
Operator and dates
Trip date: 2019-06-10
Operator: Hyoungmun Choi
Report date: 2019-06-11
Overview
After installation of the vibration isolation platform, the vibration environment was measured to confirm there is no problem for equipment use. Measurement date: Monday, 2019-06-10; operator: Hyoungmun Choi, DAEIL SYSTEMS; place of measurement: Institute for Basic Science 2nd floor analysis lab; equipment model: NIKON_ECLIPSE.
Measurement summary (VC-Class, general condition)
| Test Condition | VC-Class (general condition) |
|---|---|
| Z | |
| Floor | D |
| Isolation tabletop | G |
Omnidirectional performance is favorable; VC-Class graphs are attached. Measurements were taken under general conditions (SEM pump running) and routine conditions (SEM/coating equipment pumps running / people walking). Even when the surroundings change (pumps operating or people moving), the vibration environment at the isolation tabletop is not greatly affected. During image measurement the customer was satisfied with performance.
UD350 internal program performance measurement result
Z axis (internal program)
X axis (internal program)
Y axis (internal program)
Octave Band Result (BASE: 바닥, TOP: 제진대 상부)
Z axis (octave band)
X axis (octave band)
Y axis (octave band)
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