Installation Report

DVIA-ULF Series

06-11-2019

Institute for Basic Science NIKON ECLIPSE DVIA-UD350 (P14) Performance Report

DVIA-U Series

Installation Report

Institute for Basic Science

Nikon

ECLIPSE

DVIA-UD350

P14

201906

Institute for Basic Science (UD350_P14 Set_Up)

Site checklist

Target equipment	NIKON_ECLIPSE
Place of installation	Institute for Basic Science, 2nd floor analysis lab
Remark	Vibration isolation performance is good
END USER	Institute for Basic Science

Operator and dates

Trip date: 2019-06-10

Operator: Hyoungmun Choi

Report date: 2019-06-11

Overview

After installation of the vibration isolation platform, the vibration environment was measured to confirm there is no problem for equipment use. Measurement date: Monday, 2019-06-10; operator: Hyoungmun Choi, DAEIL SYSTEMS; place of measurement: Institute for Basic Science 2nd floor analysis lab; equipment model: NIKON_ECLIPSE.

Measurement summary (VC-Class, general condition)

Test Condition	VC-Class (general condition)
	Z
Floor	C
Isolation tabletop	G

Omnidirectional performance is favorable; VC-Class graphs are attached. Measurements were taken under general conditions (SEM pump running) and routine conditions (SEM/coating equipment pumps running / people walking). Even when the surroundings change (pumps operating or people moving), the vibration environment at the isolation tabletop is not greatly affected. During image measurement the customer was satisfied with performance.

UD350 internal program performance measurement result

Z axis (internal program)

X axis (internal program)

Y axis (internal program)

Octave Band Result (BASE: 바닥, TOP: 제진대 상부)

Z axis (octave band)

X axis (octave band)

Y axis (octave band)

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

*Notes:*

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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