Institute for Basic Science (IBS) NIKON_DS-Qi2 UD350 P11 Performance Report (April 2019)
Contents
Institute for Basic Science (IBS) UD350 P11
Site checklist
| Target equipment | NIKON_DS-Qi2 |
|---|---|
| Place of installation | Institute for Basic Science, 2nd floor analysis laboratory |
| Remark | Isolator performance — good |
| END USER | Institute for Basic Science |
Operator and dates
| Field | Value |
|---|---|
| Date of business trip | April 17, 2019 |
| Engineer | Hyoung Mun Choi |
| Report written date | April 18, 2019 |
Overview
A vibration survey was conducted after installing the vibration isolation platform to verify that equipment use would not be affected.
Measurement date: Tuesday, April 17, 2019 — Engineer: Hyoung Mun Choi, Manager, DAEIL SYSTEMS.
Measurement site: Institute for Basic Science, 2nd floor analysis laboratory.
Equipment model: NIKON_DS-Qi2.
Measurement summary (VC-Class)
| Test Condition | VC-Class (general conditions) |
|---|---|
| Z | |
| Building floor | C |
| Isolator top plate | G |
Omnidirectional performance is good and VC-Class graphs are attached.
Measurements were conducted under general conditions (SEM pumps running) and normal conditions (SEM/coater pumps running while people walked).
Even when pumps around the facility operate or people move about and the surroundings change, the vibration environment above the isolator surface is barely affected.
The customer confirmed satisfaction with imaging performance during the measurement session.
UD350 internal program performance measurement result
Z axis (internal program)
X axis (internal program)
Y axis (internal program)
Octave Band Result (BASE: Floor, TOP: isolator top plate)
Z axis (octave band)
X axis (octave band)
Y axis (octave band)
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