Institute for Basic Science (IBS) NIKON SMZ745 UD350 P10 Performance Report (April 2019)

A vibration survey was conducted after installing the vibration isolation platform to verify that equipment use would not be affected.

Measurement date: Tuesday, April 17, 2019 — Engineer: Hyoung Mun Choi, Manager, DAEIL SYSTEMS.

Measurement site: Institute for Basic Science, 2nd floor analysis laboratory.

Equipment model: NIKON.

Omnidirectional performance is good and VC-Class graphs are attached.

Measurements were conducted under general conditions (SEM pumps running) and normal conditions (SEM/coater pumps running while people walked).

Even when pumps around the facility operate or people move about and the surroundings change, the vibration environment above the isolator surface is barely affected.