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Installation Report
DVIA-T Series
10-20-2022

Institute for Basic Science Microscope DVIA-UD350 (190218R2-1) Installation Report

DVIA-UD Series
Installation Report
Institute for Basic Science
DVIA-UD350
Microscope
190218R2-1

Contents

Prepared for

Institute for Basic Science

Prepared by

Engineer: Youngha Lee

Tuning date: 22.10.20

Report written date: 22.10.20

Date of business trip : 17.12.27~17.12.29

Overview

By re-tuning the DVIA-UD350, the current active vibration isolation platform works as intended.

System Information

Model: DVIA-UD350

Serial Number: 190218R2-1

Engineer

Youngha Lee from DAEIL SYSTEMS

Tuning Date

October 20, 2022

Location

Institute for Basic Science, Daejeon

Equipment

Microscope

Summary of Vibration Results

Measurement pointZ-axis (Vertical) 1-10 HzZ-axis (Vertical) 12.5-100 HzX-axis (Left to Right) 1-10 HzX-axis (Left to Right) 12.5-100 HzY-axis (Front to Back) 1-10 HzY-axis (Front to Back) 12.5-100 Hz
FloorDCFEFE
ActiveGFGGGG

Data and Image

Z-axis (Vertical) VC curves — Floor

Z-axis (Vertical) VC curves — Active

Z-axis (Vertical) Transmissibility

X-axis (Left to Right) VC curves — Floor

X-axis (Left to Right) VC curves — Active

X-axis (Left to Right) Transmissibility

Y-axis (Front to Back) VC curves — Floor

Y-axis (Front to Back) VC curves — Active

Y-axis (Front to Back) Transmissibility

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-T Series
Date10-20-2022
Tags
DVIA-UD Series
Installation Report
Institute for Basic Science
DVIA-UD350
Microscope
190218R2-1

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