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Installation Report
DVIA-M Series
07-20-2017

Yangzhou Changelight TESCAN LYRA3 DVIA-MB1000 (MB1000 P44) China installation trip report — 2017.07.20

DVIA-M Series
Installation Report
DVIA-MB1000
MB1000 P44
TESCAN
LYRA3
China
Yangzhou

China business trip report (MB1000_P44 Set up)

Target equipment

TESCAN LYRA3

Place of installation

중국 양주 (Yanghou)

Remark

1층에 위치한 기업연구소에 설치. FAB설치(방진시설)

END USER

YANGHOU CHANGELIGHT COMPANY

Date of business trip

출장일 : 17.07.18

Trip personnel

출장자 : 임종욱

Report written date

작성일 : 17.07.20

Installation photograph

Installation result summary

Test DirectionVC-ClassBaseTop
ACTIVEZDF
XFG
YFG

Good performance in all directions.

Further feedback will be collected after reviewing the images.

MB1000 internal program performance measurement result

Z axis (MB1000 internal program)

X axis (MB1000 internal program)

Y axis (MB1000 internal program)

Vibration environment measurement results

Z axis (vibration environment measurement)

X axis (vibration environment measurement)

Y axis (vibration environment measurement)

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date07-20-2017
Tags
DVIA-M Series
Installation Report
DVIA-MB1000
MB1000 P44
TESCAN
LYRA3
China
Yangzhou