DVIA-ML Series
Active Control.Absolute Stillness.
90% vibration isolation at 1 Hz in 6 Degrees of Freedom. Engineered for electron microscopes that image at the nano scale.
Your electron microscope deserves zero disturbance.
The DVIA-ML doesn't just reduce vibration. It eliminates it. Advanced sensors detect floor disturbances as low as 0.3 Hz. Adaptive algorithms respond in 0.5 ms. And electromagnetic actuators generate the exact opposing force so your imaging stays flawless, every time.
Engineered for the world's
most demanding instruments.
The DVIA-ML series delivers VC-B to VC-G vibration criteria across all four supported metrology domains.
Every application demands a different isolation strategy — the DVIA-ML series adapts to each.
SEM
Scanning Electron Microscopy
Nano-surface imaging without drift
Floor vibrations cause image drift and blur at magnifications above 50,000×. The DVIA-ML cancels disturbances from 0.5 Hz, keeping electron beams precisely on target for artifact-free SEM imaging.
Supported Manufacturers
Thermo Fisher · Zeiss · JEOL · Tescan · Hitachi · CIQTEK
TEM
Transmission Electron Microscopy
Atomic resolution. Zero mechanical noise
HRTEM and STEM modes demand sub-angstrom stability. Building vibrations — even imperceptible ones — destroy lattice fringe contrast. The DVIA-ML provides the mechanical silence these instruments require.
Supported Manufacturers
Thermo Fisher · JEOL · Hitachi · Tescan · CIQTEK
XRM
X-Ray Metrology
Precision diffraction. Clean peaks
X-ray diffraction, reflectometry, and fluorescence all require vibration-free sample positioning. The low-frequency vibrations broaden diffraction peaks and distort thin-film measurements. The DVIA-ML restores data integrity.
Supported Manufacturers
Bruker · Zeiss
EBL
Electron Beam Lithography
Precision lithography. Flawless patterns.
Electron beam lithography requires vibration-free sample positioning. Micro-vibrations cause beam drift, increasing line-edge roughness and distorting nanoscale patterns. The DVIA-ML ensures exact pattern transfer and pattering integrity.
Supported Manufacturers
Raith · JEOL
NMR
NMR Spectroscopy
Magnets protected. Spectra preserved
Superconducting magnets at 600–1200 MHz are hypersensitive to building vibrations. Floor motion degrades shim stability and spectral resolution. The DVIA-ML isolates the entire magnet assembly from floor vibration at all frequencies.
Supported Manufacturers
Bruker · Jeol
DVIA-ML Installation Guide
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Feedback corrects. Feedforward anticipates.
Feedback measures vibration on the isolated mass and counters it in real time. Feedforward reads the floor and cancels disturbances before they arrive. Together, they deliver exceptional low-frequency isolation. Your instruments operate as if the vibration doesn't exist.
How it works
Passive Isolation (Spring & Damper):
Without active controls, the spring (k) and damper try to absorb shocks. However, at low frequencies, they can actually amplify the floor disturbance (d), causing the mass to resonate.
Feedforward Control:
Leverages ground sensor data to proactively command the actuators, nullifying floor vibrations before they reach the isolated mass.
Feedback Control:
Continuously measures the isolated mass's residual vibration (y) and uses the actuators to counteract it in real time.
Together, these advanced control mechanisms significantly enhance isolation performance, keeping the mass nearly perfectly still!
System Controls
Toggle to observe how feedback and feedforward mechanisms counteract low-frequency floor vibrations.
Floor Disturbance
Simulate low-frequency vibration
Feedforward Control
Proactive floor sensing
Feedback Control
Reactive mass correction
Every detail engineered
for nanoscale precision.
Stage 1: Raw Input
Extremely subtle micro-vibrations are captured by the sensors. Due to their low amplitude, they are easily lost amidst ambient noise.
Stage 2: Hardware Amp
The DVIA-ML unit applies analog gain to boost the entire signal. Both the desired low-frequency wave and the high-frequency noise are amplified.
Stage 3: Software Filter
Advanced digital algorithms isolate and retain only frequencies down to 0.3 Hz, entirely stripping away the noise to leave a clean, readable sine wave.
Detection from 0.3 Hz.
A hardware amplifier boosts low-frequency gain.
A digital filter refines the signal. Together, they extend
accurate detection and isolation down to 0.3 Hz.
Responds before you notice.
A floating-point DSP delivering 1800 MFLOPS
processes vibration data in real time.
Response time: 0.5 ms. By the time vibrations reach
your microscope, it's already been cancelled.
Detects the imperceptible.
11 Geophone velocity sensors with 2.55 V/in/s sensitivity and just 0.15% distortion. They capture low frequency vibrations other systems miss entirely so the DVIA-ML can cancel what it can't ignore.
Six axes. Zero compromise.
The DVIA-ML controls all six degrees of freedom. Three translational, three rotational. No vibration path goes uncorrected. Its algorithm decouples each axis independently, eliminating cross-coupling. Sub-micron translational and sub-microradian angular stability, maintained simultaneously.
Magnetically silent.
Less than 0.05 μT magnetic field. Electron beams are sensitive to the smallest magnetic interference. The DVIA-ML is engineered to be magnetically silent — your beam stays true, your images stay sharp.
173 mm. Full performance,
minimal footprint.
The lowest profile in its class. Full isolation performance in space-constrained EM rooms that your tallest microscopes get full clearance without compromise.
Outperforms. Everything.
Isolation from 0.5 Hz.
User Interface.
Monitor. Log. Verify data.
The DVIA-ML UI displays real-time vibration levels, actuator response, and sensor output across all six axes. Every data can be automatically logged. Review historical trends, export reports, or verify isolation performance at any time. No hidden processes. No black-box algorithms. Your facility team sees exactly what the system is doing, why it's responding, and how it's performing against specification.
Transmissibility Curve
Auto Spectrum
VC Curves
Sensors and Actuators
Your microscope. Your platform.
Every electron microscope is different. The DVIA-ML is engineered to match yours.
We review your instrument specifications, floor conditions, and facility constraints. Dimensions, weight distribution, mounting interfaces, load paths, and cable routing are configured before manufacturing begins. No on-site modifications. No compromises to isolation performance.
Glacios 2
Thermo Fisher Scientific
Tecnai TF20
Thermo Fisher Scientific
Krios G4
Thermo Fisher Scientific
Spectra
Thermo Fisher Scientific
Specifications
| Model | DVIA-ML1000 | DVIA-ML3000 |
|---|---|---|
| Dimensions | Customizable | |
| Maximum Load Capacity | 1700kg | 3000kg |
| Vibration Isolation Technology | Feedback and Feedforward Control | |
| Degrees of Freedom | 6 (X, Y, Z, θx, θy, θz) | |
| Active Isolation Bandwidth | 0.5 – 200 Hz | |
| Vibration Isolation | 80 – 90% at 1 Hz | |
| Actuator | Electromagnetic Actuator | |
| Maximum Actuator Force | Vertical 40 N, Horizontal 20 N | |
| Vibration Sensor | Geophone, Sensitivity: 2.55 V/in/s (100.4 V/m/s) ± 10% | |
| Leveling Repeatability | Repeatability: ± 0.1 mm | |
| Controller | Built-in | |
| Environmental Protection | CE and TUV | |
| Power Requirements | Line Voltage: 100 – 260V AC, Line Frequency: 50/60 Hz | |
| Air Requirements | Air Pressure: 4 – 6 bar, Air Delivery: 10 L/min | |
| Environmental Requirements | Temperature: 5 – 50 °C, Humidity: 20 – 90 % | |
Case Studies
Proven in the field. Installed in the world's most advanced semiconductor, aerospace, and research facilities.
Every system measured and verified on-site.
YIMO Naura Nanchang Hitachi SU8600 DVIA-ML1000 (240513R2) Installation Report
DVIA-ML1000 installation report (serial 240513R2) for Hitachi SU8600 FE-SEM via YIMO, Nanchang, for Naura Microelectronicst.
NM-TECH Moscow Thermo Fisher Helios Nanolab 450 DVIA-ML1000 (240719R3-2) Installation Report
DVIA-ML1000 installation report (serial 240719R3-2) for Thermo Fisher Helios Nanolab 450 FIB-SEM at NM-TECH, Moscow Zelenograd.
Zhejiang Eagle Semiconductor ZEISS Crossbeam 550 DVIA-ML1000 (260110R3) Installation Report
DVIA-ML1000 installation report (serial 260110R3) for ZEISS FIB-SEM Crossbeam 550 at Zhejiang Eagle Semiconductor Vibration Isolation Table, Zhejiang, China.
Guangzhou GRG Thermo Fisher Talos TEM DVIA-ML3000 (260128R4) Installation Report
DVIA-ML3000 (S/N 260128R4) installation report at GUANGZHOU GRG METROLOGY & TEST CO., LTD., Zhejiang, China — Thermo Fisher Scientific TEM Talos.
Hitachi SU8700 FE-SEM DVIA-ML1000 (230320R1) Installation Report
DVIA-ML1000 installation report (serial 230320R1) for a Hitachi SU8700 FE-SEM at Shanghai Jiao Tong University, Shanghai, China.
Kunshan DeKaiYiTe ZEISS Sigma 360 DVIA-ML1000 (260110R1-2) Installation Report
DVIA-ML1000 installation report (serial 260110R1-2) for ZEISS FE-SEM Sigma 360 at Kunshan DeKaiYiTe.