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설치 보고서
DVIA-M Series
02-05-2025

DVIA-ML1000S (241008R1) Installation Report

DVIA-M Series
Installation Report
Tier-1 Semiconductor
Semiconductor
DVIA-ML1000S
241008R1

Contents

개요

N/A

진동 제어 시스템 정보

모델: DVIA-ML1000S

시리얼 넘버: 241008R1

담당 엔지니어

이채원, 서종화

튜닝 일자

25.02.04

보고서 작성일

25.02.05

End User

삼성디스플레이 기흥

튜닝 횟수

N/A

설치 위치

N/A

장비

제조사: N/A

장비: N/A

모델: DVIA-ML1000S

장비 상태

모든 장비 on/off

측정 요약

측정 장소상태장비 스펙방향측정값결과
FrameLidESCStageFrameLid
디에이치 연구동All turned onVC-DVerticalVC-D @10 HzVC-G @10 HzVC-G @10 HzVC-G @10 Hz✓ PASS
Left to RightVC-D @25 HzVC-G @25 HzVC-G @25 HzVC-F @25 Hz✓ PASS✓ PASS
Front to BackVC-D @20 HzVC-G @20 HzVC-G @20 HzVC-G @20 Hz✓ PASS✓ PASS
측정 장소상태장비 스펙방향측정값결과
FrameLidESCStageFrameLid
디에이치 연구동All turned offVC-DVerticalVC-D @10 HzVC-G @10 HzVC-G @10 HzVC-G @10 Hz✓ PASS
Left to RightVC-D @25 HzVC-G @25 HzVC-G @25 HzVC-G @25 Hz✓ PASS✓ PASS
Front to BackVC-D @20 HzVC-G @20 HzVC-G @20 HzVC-G @20 Hz✓ PASS✓ PASS
측정 장소상태장비 스펙방향측정값결과
FrameLidESCStageFrameLid
디에이치 연구동Only Z motor Turned onVC-DVerticalVC-D @10 HzVC-G @10 HzVC-G @10 HzVC-G @10 Hz✓ PASS
Left to RightVC-D @ 25 HzVC-G @25 HzVC-G @25 HzVC-G @25 Hz✓ PASS✓ PASS
Front to BackVC-D @20 HzVC-G @20 HzVC-G @20 HzVC-G @20 Hz✓ PASS✓ PASS
측정 장소상태장비 스펙방향측정값결과
FrameLidESCStageFrameLid
디에이치 연구동Only Z motor Turned offVC-DVerticalVC-D @10 HzVC-G @10 HzVC-G @10 HzVC-G @10 Hz✓ PASS
Left to RightVC-D @25 HzVC-G @25 HzVC-G @25 HzVC-G @25 Hz✓ PASS✓ PASS
Front to BackVC-D @20 HzVC-G @20 HzVC-G @20 HzVC-G @20 Hz✓ PASS✓ PASS

데이터 및 이미지

All turned on - Lid - Vertical VC Curves

All turned on - Lid - Vertical VC Curves

All turned on - Lid - Vertical VC Curves

State - Location - Vertical Autospectrum

State - Location - Vertical Transmissibility

State - Location - Left to Right VC Curves

State - Location - Left to Right Autospectrum

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

State - Esc - Vertical VC Curves

State - Esc - Vertical VC Curves

State - Esc - Vertical VC Curves

State - Location - Vertical Autospectrum

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right Autospectrum

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

State - Stage - Vertical VC Curves

State - Stage - Vertical VC Curves

State - Stage - Vertical VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right Transmissibility

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

All turned off - Lid - Vertical VC Curves

All turned off - Lid - Vertical VC Curves

All turned off - Lid - Vertical VC Curves

State - Location - Vertical Autospectrum

State - Location - Vertical Transmissibility

State - Location - Left to Right VC Curves

State - Location - Left to Right Autospectrum

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

State - Esc - Vertical VC Curves

State - Esc - Vertical VC Curves

State - Esc - Vertical VC Curves

State - Location - Vertical Autospectrum

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right Autospectrum

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

State - Stage - Vertical VC Curves

State - Stage - Vertical VC Curves

State - Stage - Vertical VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right Transmissibility

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

Only Z motor turned on - Lid - Vertical VC Curves

Only Z motor turned on - Lid - Vertical VC Curves

Only Z motor turned on - Lid - Vertical VC Curves

State - Location - Vertical Autospectrum

State - Location - Vertical Transmissibility

State - Location - Left to Right VC Curves

State - Location - Left to Right Autospectrum

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

State - Esc - Vertical VC Curves

State - Esc - Vertical VC Curves

State - Esc - Vertical VC Curves

State - Location - Vertical Autospectrum

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right Autospectrum

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

State - Stage - Vertical VC Curves

State - Stage - Vertical VC Curves

State - Stage - Vertical VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right Transmissibility

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

Only Z motor turned off - Lid - Vertical VC Curves

Only Z motor turned off - Lid - Vertical VC Curves

Only Z motor turned off - Lid - Vertical VC Curves

State - Location - Vertical Autospectrum

State - Location - Vertical Transmissibility

State - Location - Left to Right VC Curves

State - Location - Left to Right Autospectrum

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

State - Esc - Vertical VC Curves

State - Esc - Vertical VC Curves

State - Esc - Vertical VC Curves

State - Location - Vertical Autospectrum

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right Autospectrum

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

State - Stage - Vertical VC Curves

State - Stage - Vertical VC Curves

State - Stage - Vertical VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right Transmissibility

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

Reference

일반 진동 기준

기준 곡선설명진폭
μm/s (µin/s)		세부 크기
μm
Workshop (ISO)뚜렷하게 체감할 수 있는 진동 수준. 워크숍 및 민감하지 않은 구역에 적합.800 (32,000)N/A
Office (ISO)인지 가능한 수준의 진동. 사무 공간 및 기타 민감하지 않은 환경에 적합.400 (16,000)N/A
Residential Area (ISO)거의 느껴지지 않는 수준의 진동. 대부분의 수면 공간에 적절.200 (8,000)75
Operating Theatre (ISO)진동이 감지되지 않는 수준. 외과 수술실, 100배율 이하 현미경에 적합.100 (4,000)25
VC-A400배율 광학 현미경, 미세 저울, 광학 저울에 적합.50 (2,000)8
VC-B3μm 선폭 검사 및 리소그래피 장비에 적합.25 (1,000)3
VC-C1000배율 광학 현미경, 1μm 리소그래피 장비에 적합.12.5 (500)1 - 3
VC-D전자현미경(SEM/TEM) 등 까다로운 장비에 적합.6.25 (250)0.1 - 0.3
VC-E나노미터 스케일 E-Beam 리소그래피 등 가장 까다로운 시스템용.3.12 (125)< 0.1
VC-F극도로 조용한 연구 공간용. 설계 기준으로는 권장되지 않음.1.56 (62.5)N/A
VC-G극도로 조용한 연구 공간용. 설계 기준으로는 권장되지 않음.0.78 (31.25)N/A

참고:

- VC-A/B는 8-80 Hz, VC-C~VC-G는 1-80 Hz 범위의 1/3 옥타브 밴드에서 측정.

- 세부 크기는 마이크로일렉트로닉스 제조에서의 선폭 또는 의료 연구에서의 입자 크기를 의미.

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카테고리
설치 보고서
시리즈DVIA-M Series
작성일02-05-2025
태그
DVIA-M Series
Installation Report
Tier-1 Semiconductor
Semiconductor
DVIA-ML1000S
241008R1

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