Question 1

What is DVIA?

Accepted Answer

DVIA is the active vibration isolation product series of DAEIL SYSTEMS, a Korean manufacturer of precision vibration isolation equipment since 1984. The series covers six model lines: DVIA-T tabletop platforms for desktop microscopy, DVIA-M OEM modules for embedded integration, DVIA-ML custom platforms for SEM, TEM and e-beam systems, DVIA-MLP platforms for Thermo Fisher SEM, DVIA-ULF ultra-low-frequency modular isolators for SEM, TEM and AFM, and DVIA-P systems for semiconductor metrology tools.

Question 2

What is an active vibration isolation system?

Accepted Answer

An active vibration isolation system cancels vibration with a closed control loop instead of a passive spring. Sensors measure vibration, a digital signal processor computes an equal-and-opposite counter-force, and actuators apply it in real time. The DAEIL SYSTEMS DVIA series controls all six degrees of freedom, has no low-frequency resonance, and starts isolating at 0.5 Hz, with active bandwidth up to 200 Hz depending on model.

Question 3

How does active vibration isolation work?

Accepted Answer

Two control loops run in parallel. Feedback: sensors on the isolated platform measure residual vibration, and a DSP drives the actuators to cancel it, with response under 0.5 ms on some models. Feedforward: sensors on the floor detect incoming ground vibration and cancel it before it reaches the payload. DVIA systems apply both across all six degrees of freedom.

Question 4

What is the difference between active and passive vibration isolation?

Accepted Answer

A passive pneumatic isolator is a spring with a natural frequency of 1.2–3.0 Hz. It isolates well above roughly 5–10 Hz but amplifies vibration near resonance. An active system measures vibration and cancels it: isolation starts at 0.5 Hz, reaches 80–90% at 1 Hz (DVIA-ML), and there is no resonance amplification at any frequency — exactly where passive mounts perform worst.

Question 5

When do I need active vibration isolation instead of a passive table?

Accepted Answer

When the vibration limiting your instrument sits below about 5 Hz. Building motion concentrates energy at low frequency, where passive pneumatic isolators amplify rather than isolate. If a site survey shows peaks in the 1–3 Hz band, or an electron microscope or AFM still shows vibration-induced blur on a passive table, active isolation targets that band directly — and is the practical route to strict VC-class siting requirements.

Question 6

What frequency range does active vibration isolation cover?

Accepted Answer

DVIA systems actively isolate from 0.5 Hz, with bandwidth extending up to 200 Hz depending on model (0.5–200 Hz on the DVIA-ML). At 1 Hz the DVIA-ML delivers 80–90% isolation, and 90% or better at 2 Hz and above, in all six degrees of freedom. This covers the low-frequency band where passive pneumatic isolators either amplify vibration or barely attenuate it — the band that matters most for electron microscopes and nanoscale metrology.

Question 7

Which instruments benefit from active vibration isolation?

Accepted Answer

Instruments resolving nanometer or sub-nanometer features: SEM, TEM and cryo-EM, AFM/SPM, e-beam lithography, X-ray metrology, NMR, and semiconductor wafer metrology and inspection (CD-SEM, DR-SEM, photomask inspection). The DVIA lineup covers each: DVIA-ML for electron microscopes up to 6,000 kg, DVIA-P for the fab, DVIA-T for desktop microscopy, and DVIA-M for OEM integration inside the instrument itself.

항목	액티브 제진	패시브 제진 (공압식)
차단 시작 주파수	0.5 Hz부터 차단 시작 — 어떤 패시브 공압 제진대의 고유진동수보다 낮은 지점	대략 5–10 Hz 이상에서만 유효한 절연, 그 이하 대역은 그대로 전달되거나 증폭
1 Hz에서의 성능	바닥 진동의 80–90% 제거, 2 Hz 이상에서는 90% 이상(DVIA-ML)	차단 불가 — 1.2–3.0 Hz 공진 부근에서 진동이 오히려 증폭
공진 증폭	없음 — 제어 루프가 공진 피크 대신 감쇠를 부여해 전달률이 1을 넘지 않음	고유진동수 부근에서 전달률(transmissibility)이 1을 초과, 이 대역에서는 제진대가 상황을 악화
외란 응답	액추에이터가 실시간 상쇄, 일부 모델 응답 속도 0.5 ms 미만	감쇠가 약한 에어 스프링이 고유진동수로 울리며 에너지가 소산될 때까지 잔진동 지속
제어 축	X, Y, Z, θx, θy, θz 6자유도 전체 — 제어 대역 0.5 Hz부터(모델에 따라 최대 200 Hz)	제어 루프 없음 — 스프링 강성과 감쇠로 거동이 설치 시점에 고정
지반 진동 처리	피드포워드 바닥 센서가 유입 진동을 감지해 페이로드 도달 전에 상쇄	공진 이상 대역만 필터링, 그 이하는 통과하거나 증폭

DVIA 액티브 제진대

제품 라인업.

DVIA-T

DVIA-M

DVIA-ML

DVIA-MLP

DVIA-ULF

DVIA-P

액티브 제진(Active Vibration Isolation)이란?

액티브 vs 패시브 제진

0.5 Hz부터 시작하는 제진 성능

적용 분야: SEM · TEM · AFM · 반도체 계측

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