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Vibration Isolation Case Studies

DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.

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441 case studies
Seoul National University Thermo Fisher SEM Apreo 2 DVIA-MB1000 Installation Report — 2024.02.26

DVIA-MB1000 (serial 200109R2) installation tuning and vibration measurement at Seoul National University College of Dentistry; Thermo Fisher Scientific SEM Apreo 2 equipment; Jongwon Park and Chaewon Lee (DAEIL SYSTEMS). Measurement with equipment Turned off. Publishes transmissibility curves, RMS velocity VC curves per axis, and an installation photograph. The header strip graphic before Prepared for and the Reference Generic Vibration Criteria raster figure are omitted; Reference uses the site standard VC criteria markdown table.

TESCAN Solaris GMH FIB-SEM DVIA-M1000 (230509R6-3) — Pengxin Micro, 2024-01-31

Pengxin Micro — TESCAN Solaris GMH FIB-SEM on DVIA-M1000 serial 230509R6-3. M1000 internal program performance measurement (Z / X / Y) from the 2024.01.31 handout.

Tier-1 Semiconductor DVIA-MB3000 (230818R1-2) Installation Worksheet — setup 2024.02.01

DVIA-MB3000 isolation platform (serial 230818R1-2): on-site worksheet with setup dated 2024.02.01, reporting dated 2024.07.05, remark Good Performance, and three internal-program screenshots (Vertical, Left to Right, Front to Back). End user and installation site fields were left blank on the worksheet (shown as N/A on the web). Engineer Byeonghun Cho (DAEIL SYSTEMS).

ZEISS Korea Innovation Center DVIA-MB1000 (231128R4), ZEISS FIB-SEM Crossbeam 550 Installation Report

DVIA-MB1000 installation report (serial 231128R4) prepared for ZEISS for the Crossbeam 550 installation at ZEISS KOREA Innovation Center (Hwaseong). Overview and conclusion follow the bilingual report wording; vibration results include the Floor vs Active summary table plus UI-program Transmissibility curves, VC curves by axis (Data Physics QUATTRO description graph), manufacturer equipment specification figure, installation photo; Reference publishes the Generic Vibration Criteria markdown table only (reference graphic omitted). Decorative header/logo raster from Word excluded.

Omicron STM DVIA-MB1000 (230905R3) MB1000 Internal Program Performance — 2024.01.23 Measurement

MB1000 handout DVIA-MB1000 serial 230905R3; target equipment Omicron STM with setup 24.01.23 and reporting 24.07.05. Measurements summarized as M1000 internal program screenshots for Z, X, and Y axes. Word-embedded decorative header raster (media preceding body headings) omitted from publication; Reference publishes the Generic Vibration Criteria markdown table only.

Tier-1 Semiconductor ZEISS Xradia 620 Versa DVIA-MB3000 (231005R2) Installation Report — 2023.12.27

DVIA-MB3000 (serial 231005R2) installation report dated 27 December 2023 at Tier-1 Semiconductor with ZEISS Xradia 620 Versa X-ray Microscope: Summary of vibration results table (Floor vs Active VC curve grades across axis bands), VC curves for Floor and Active states per axis, and Reference diagrams with explanatory notes comparing VC curves and Modified Mercalli intensity. Engineer Jongwon Park (DAEIL SYSTEMS); tuning date and report written date 23.12.27.