Pneumatic Vibration Isolation Table Set point: 502.34 (NN)
Active Vibration Isolation Table (DVIA-T45) Set point: 563.25 (NN)
Conclusion
The line profile indicates that the noise of the pneumatic vibration isolation tables is 10 times greater than the active vibration isolation table and the cause of excessive noise of the XE-100-02 due to the vibration isolation performance difference between the pneumatic vibration isolation table and the active vibration isolation table.
The AFM XE-100-01 confirms that it is possible to measure fine samples of the XE-100-02 with DAEIL SYSTEMS's tabletop active vibration isolation platform.


