Tier-1 Semiconductor Cheonan Engineer Room DVIA-MB3000 (P4) Vibration Measurement — 16 Jun 2017

After installation of the vibration isolation platform, vibration conditions were measured to verify that equipment use would not be affected by unacceptable vibration levels.

Measurement date: 16 June 2017 (Friday), engineer: Choi Seong-won (DAEIL SYSTEMS).

Measurement location: Tier-1 Semiconductor engineer room, Cheonan.

Measurement conditions: the MB3000 platform top and the laboratory floor were each measured. The onboard equipment was in STANDBY. Results are reported as VC classes.

Floor vibration is VC class C vertically and VC class E on both horizontal axes, which is favourable except along the vertical axis.

With the vibration isolation platform in service, all directions satisfy VC classes of E class or higher.