JEOL Tabletop SEM
Overview
Installation has been successfully completed and system performance is optimum for the T-56.
Service Report Number
NSR-0063-DAE-JEOL-20210202
Date of Service
2nd February 2021
Customer Information
Customer Organization: JEOL Asia Pte Ltd
End-user Contact: Mr. Patrick Lim
Address: 2 Corporation Rd, #01-12 Lobby A of Corporation Place, Singapore 618494
System Information
System / Model: DAEIL DVIA-T56 Active Vibration Isolation Platform (Benchtop)
System Serial Number: 210112R11
Service Type: Installation for JEOL JCM-7000 Tabletop SEM
System Status: Demo
Job Summary
1. Un-crate the platform and checks all parts for the active vibration isolation platform. Complete delivery without missing part/component.
2. Positioned the DVIA-T56 under the JEOL JCM-7000 Tabletop SEM.
3. Powered up the DVIA-T56 and performed auto load adjustment.
4. Turned on isolation for the DVIA-T56.
5. Performed remote tuning by DAEIL engineer for optimum performance.
6. Performed vibration measurements on the table and base plate of the platform.
7. Please refer to appendix A for the vibration plots for XYZ.
8. Please refer to appendix B for the system images.
9. Please refer to appendix C for the Gold on carbon images at 50kX and 100kX.
APPENDIX A: Vibration measurements for X, Y, Z
Appendix B: System images
Appendix C: Gold on Carbon Images (50kX)
1280 x 1024 (10s) - Bare system vs Daeil
1280 x 1024 (20s) - Bare system vs Daeil
2560 x 2048 - Bare system vs Daeil
Appendix C: Gold on Carbon Images (100kX)
1280 x 1024 (10s) - Bare system vs Daeil
1280 x 1024 (20s) - Bare system vs Daeil
2560 x 2048 - Bare system vs Daeil
