AFM SILICON CANTILEVER IMAGING

Case Studies

DVIA-T Series

Analysis - Frequency Graph

- X-axis(A-B) voltage measurement of PD on Airtable(Sinking/Floating mode), Bungee-cord, and Active vibration isolator.

- 50kS/s(40ns) sampling rate - FFT is measured up to 25kHz

- Over 1kHz, All substrates have similar noise.

- Under 1kHz, Airtable(Sinking Mode) is the worst.

- Airtable(Floating Mode) and DVIA-T45 is the best.

Analysis - Standard Deviation

- STD is measured for signal noise

- Sinking (0.02763V), Floating (0.00936V), Bungee-cord (0.00856V), and Active(0.00579V).

- DVIA-T45 yields the best performance

Imaging TEST in Different Substrate (Silicon Cantilever)